Evaluation of grinding performance and removal mechanism of epoxy resin coated single crystal SiC

Chuan Sun,Chengxiang Wei,Shuoshuo Qu,Pengfei He,Zhenfeng Hu,Xiubing Liang
DOI: https://doi.org/10.1016/j.triboint.2024.110147
IF: 5.62
2024-08-26
Tribology International
Abstract:The inherent hardness and brittleness of single crystal silicon carbide (SiC) materials pose challenges in processing high-quality surface products from SiC. To overcome these challenges, an epoxy resin coated grinding method for SiC was developed and employed in this study. The objective was to investigate how the width (d) and thickness (h) of the epoxy resin coating affect the quality of the ground surface. The research indicated that as d increased from 0 to 2.5 mm, the average surface roughness ( Ra ) of SiC decreased from 57 to 32 nm. Similarly, as h increased from 0 to 0.8 mm, the average Ra decreased from 53 to 31 nm.
engineering, mechanical
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