Abstract:The temperature field evolution and material removal process during picosecond (ps) laser micro-grooving of single crystalline germanium (Ge) are explored by developing a 2D two-temperature model (TTM). The transient temperature-dependent thermal and optical properties of electrons and lattice are incorporated for accurate calculations, and the electron-lattice coupling strength is estimated considering the electron transition from valence band (VB) to conduction band (CB) mainly caused by one photon absorption. Different material removal mechanisms, i.e. the thermal way caused by vaporization and the athermal manner resulted from covalent bonds breakage, are proposed and compared with experimental results. The variation trends of the thermal model predicted groove depths are similar and consistent with the measured ones within selected ranges, while the athermal model leads to groove depth far from reality, demonstrating that the vaporization-caused mechanism is the proper one. Employing the verified model, simulation study is conducted to explore the evolution of temperature field under different fluences. Under a low fluence of 0.071 J/cm2, the peak electron temperature shows a decreasing trend with pulse width, and the temperatures of electron and lattice evolve in a similar pattern when the pulse duration is wider than 200 ps. For a higher fluence of 7.074 J/cm2, lattice temperature increases up to melting and boiling point within 1 ps and 3 ps, respectively, and the groove depth produced by a 12 ps pulse heating is about 0.65 μm. Afterwards, residual heat diffusion during pulse interval and further material removal during following pulse heating will occur, leading to a deeper groove. Moreover, the effects of laser power and critical free electron density on the machining process are also analysed, demonstrating that an increase in any of these two parameters results in a faster element removal.

Femtosecond Laser Processing of Germanium: An Ab Initio Molecular Dynamics Study

Femtosecond Laser Processing of Germanium: Anab Initiomolecular Dynamics Study

Numerical Simulations of Germanium Nanofilm under Femtosecond Pulse Laser Heating

Numerical Analysis of Ultrashort Pulse Laser-Induced Thermomechanical Response of Germanium Thin Films

Optical and microstructural studies of femtosecond laser treated amorphous germanium thin coatings

A numerical study of picosecond laser micro-grooving of single crystalline germanium: Mechanism discussion and process simulation

High Spatial Frequency Laser Induced Periodic Surface Structure Formation in Germanium by Mid-Ir Femtosecond Pulses

Thermal Stress Damage Mechanism in Single-Crystal Germanium Caused by 1080 Nm Laser Irradiation

The Formation Mechanism of Femtosecond Laser-induced Periodic Structures on Germanium

Laser Induced Periodic Surface Structure Formation in Germanium by Strong Field Mid IR Laser Solid Interaction at Oblique Incidence.

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Fabrication of Ge 2 Sb 2 Te 5 crystal micro/nanostructures through single-shot Gaussian-shape femtosecond laser pulse irradiation.

Non-thermal lattice dynamics in α-quartz induced by femtosecond laser pulses: An ab initio study

Sub-Picosecond Non-Equilibrium States in the Amorphous Phase of GeTe Phase-Change Material Thin Films

Comparison of 20- to 1000-Hz Pulsed Laser and Continuous Laser Ablation of Single-Crystal Germanium Wafers

Lifetime Visualization of Femtosecond Laser-Induced Plasma on GaP Crystal

Measurement and modeling of strain waves in germanium induced by ultrafast laser pulses

A Thermal Physics Model of Continuous Wave Laser Irradiation of SiO2/Ge/Sapphire Epitaxial Films

Femtosecond Laser Deposition of Germanium Selenide onto Silicon Platform at Different Substrate Temperatures

Dislocation Analysis of Germanium Wafers under 1080 Nm Laser Ablation.