Accurate Radiation Impedance Analysis for CMUT Design

O. Hansen,Stine Løvholt Grue Pedersen,E. Thomsen,A. Havreland
DOI: https://doi.org/10.1109/IUS54386.2022.9957628
2022-10-10
IUS
Abstract:The transducer resonance frequency is a key parameter for the field of ultrasound. The resonance frequency in vacuum is well understood, and an analytical expression for the center frequency in immersion was derived by Lamb in 1920 [1], however this expression has limited validity. Importantly, the model fails to cover plate aspect ratios needed by imaging requirements and met by recently fabricated medical Capacitive Micromachined Ultrasonic Transducers (CMUTs). Based on the equation of motion a new expression for the resonance frequency in immersion is derived. The influence of the immersion medium is included via the radiation impedance, which is approximated using the well-known Taylor expansion, yielding results similar to Lamb's. For precision at smaller aspect ratios, this work proposes using the Padé approximant instead. Comparing the frequency ratio to FEM simulations, the Padé approximant shows a fourfold reduction in error from 12.0% to 3.0%.
Engineering,Medicine,Physics
What problem does this paper attempt to address?