Abstract:Designing terahertz sensors with high sensitivity to detect nanoscale thin films and single biomolecule presents a significant challenge, and addressing these obstacles is crucial for unlocking their full potential in scientific research and advanced applications. This work presents a strategy for the design optimization of metamaterial sensors employed in the detection of small amounts of dielectric materials. The sensors usually utilize the shift of the resonance frequency as an indicator of the presence of the analyte. The amount of shifting depends on intrinsic properties (electric field distribution, quality factor, and mode volume) of the bare cavity, as well as the overlap volume of its high-electric-field zone(s) and the analyte. Guided by the simplified dielectric perturbation theory, interdigitated electric split-ring resonators (ID-eSRR) are devised to significantly enhance the detection sensitivity for thin-film analytes compared to eSRRs without interdigitated fingers in the SRR gap region. The fingers of the ID-eSRR metamaterial sensor redistribute the electric field, creating strongly localized field enhancements that substantially boost the interaction with the analyte. Additionally, the periodic change of the orientation of the inherent anti-phase electric field in the interdigitated structure reduces radiation loss, leading to a higher Q-factor. Experiments with e-beam-fabricated ID-eSRR sensors operating at around 300 GHz demonstrate a remarkable frequency shift of 33.5 GHz upon deposition of a SiO2 layer with a thickness of 150 nm as an analyte simulant. The figure of merit (FOM) improves by over 50 times compared to structures without interdigitated fingers. This rational design option opens a promising avenue for highly sensitive detection of thin films and trace biomolecules.

Terahertz Sensing of Å‐scale Thin Dielectric Film Via Electron Tunnelling

Terahertz sensing of 7nm dielectric film with bound states in the continuum metasurfaces

A terahertz metasurface sensor with fingerprint enhancement in a wide spectrum band for thin film detection

Interdigitated Terahertz Metamaterial Sensors: Design with the Dielectric Perturbation Theory

Atomic-Scale Terahertz Near Fields for Ultrafast Tunnelling Spectroscopy

Field Manipulation of Electromagnetically Induced Transparency Analogue in Terahertz Metamaterials for Enhancing Liquid Sensing

Metamaterial-enhanced Terahertz Vibrational Spectroscopy for Thin Film Detection

Terahertz Sensing Based on Metasurfaces

In-Situ Thickness Measurement of Thin Deposited Layer on the Silicon Wafer Using Multi-Reflected Terahertz Electro-Magnetic Wave

High‐Performance Terahertz Sensing at Exceptional Points in a Bilayer Structure

Terahertz Biosensing with a Graphene-Metamaterial Heterostructure Platform

THz time-domain spectroscopic investigations of thin films

Ultrasensitive THz sensing with high-Q Fano resonances in metasurfaces

Deep sub-wavelength dipole cavities for terahertz thin film sensing

On-chip time-domain terahertz spectroscopy of superconducting films below the diffraction limit

Near-field terahertz probes with room-temperature nanodetectors for subwavelength resolution imaging

Principles of Measuring Thickness and Refractive Index of Thin Dielectric Film by Using Multiresonance Archimedean Spiral Metasurfaces with C Resonator in the Terahertz Frequency Range

Ultrafast terahertz control of extreme tunnel currents through single atoms on a silicon surface

Tunnel field-effect transistors for sensitive terahertz detection

Simulation Of Terahertz-Band Metamaterial Sensor For Thin Film Analyte Detection

Giant Terahertz Birefringence in an Ultrathin Anisotropic Semimetal