Abstract:Aluminum scandium nitride (AlScN) has attracted extensive attention for its excellent piezoelectric properties in the micro‐electromechanical system applications. In this work, AlScN is demonstrated to be a promising candidate for on‐chip acousto‐optic coupling interactions with outstanding piezoelectric properties as well. Based on piezoelectric Al0.6Sc0.4N film deposited on silicon‐on‐insulator platform, the proposed devices exhibit impressive acousto‐optic coupling performances over a short interaction length of 210 µm with surface acoustic waves actuated by interdigital transducers. Meanwhile, the acousto‐optic coupling performances are further improved in a compact spiral waveguide with eight interaction segments, where the measured modulation efficiency is enhanced from −21.5 to −12.5 dB and the radiofrequency (RF) 3‐dB bandwidth is narrowed from 4 to 3.1 MHz at central frequency of 3.044 GHz with RF drive power of 18.6 dBm. The measured modulation efficiency is proportional to the incident RF drive power, depicting a linear increasing trend with a slope of one as the RF power increases up to 24.6 dBm. Such acousto‐optic devices are capable of achieving broadband acousto‐optic modulation and narrow‐band microwave photonic filtering. Besides, the designed device structure provides a prospect in single‐sideband modulation, acousto‐optic frequency shift, and nonreciprocal light propagation. Acousto‐optic coupling in silicon waveguides based on piezoelectric Al0.6Sc0.4N film deposited on silicon‐on‐insulator platform is demonstrated. With a microwave signal loading on the interdigital transducer, the incident optical probe is scattered to optical sidebands by the actuated surface acoustic wave, exhibiting broadband acousto‐optic modulation and narrow‐band microwave photonic filtering.

Design and Analysis of Guided Surface Acoustic Waves in ScAlN on Sapphire for Phononic Integrated Circuits

On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Electro-Acoustic Properties of Scandium-Doped Aluminum Nitride (ScxAl1-xN) Material and its Application to Phononic Crystal-Coupled SAW Devices

Wave Propagation Direction and C-Axis Tilt Angle Influence on the Performance of ScAlN/Sapphire-Based SAW Devices.

High Performance AlScN Thin Film Based Surface Acoustic Wave Devices with Large Electromechanical Coupling Coefficient

High-Q SAW Resonators Based on High-Crystallinity AlScN-AlN-Sapphire Substrate

Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Alscn Thin Film Based Surface Acoustic Wave Devices with Enhanced Microfluidic Performance

High Electromechanical Coupling SAW Resonators Based on a-Plane AlScN-AlN-Sapphire Substrate

Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

Surface Acoustic Wave Propagation Characteristics of ScAlN/diamond Structure with Buried Electrode

High Performance 33.7 GHz Surface Acoustic Wave Nanotransducers Based on AlScN/diamond/Si Layered Structures

Nspudt Using C-Axis Tilted Scaln Thin Film

Design of high-frequency surface acoustic wave resonators based on Al0.8Sc0.2N/AlN/Sapphire multilayer structure

Epitaxial Single-Crystal ScAlN on 4H-SiC for High-Velocity, Low-Loss SAW Devices

Acousto‐Optic Modulation in Silicon Waveguides Based on Piezoelectric Aluminum Scandium Nitride Film

Generation of GHz surface acoustic waves in (Sc,Al)N thin films grown on free-standing polycrystalline diamond wafers by plasma-assisted molecular beam epitaxy

A Simulated Investigation of Lithium Niobate Orientation Effects on Standing Acoustic Waves

Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC

High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure