Abstract:Summary form only given. Nonthermal atmospheric gas discharges generated at radio frequencies have recently commanded much interest because of their immense potential for numerous applications such as etching, deposition, surface modification and sterilization. Through several detailed studies, much has been gained in the understanding of their basic electrical characteristics, their optical emission and their reaction chemistry. These studies are typically performed at a limited number of discrete points of input RF power, and as such the general perception of RF nonthermal atmospheric plasmas is that their behaviour remains largely unchanged as long as they remain diffuse and glow. Recently we reported an experimental observation that within the diffuse and glow state RF nonthermal atmospheric plasmas can behave very differently at different levels of input power. By comparison with RF glow discharges at intermediate pressure (10-100 Torr), we established that there are at least two modes, /spl alpha/ and /spl gamma/ modes, in RF nonthermal atmospheric plasmas and that their current-voltage characteristics are very different. In this contribution, we report theoretical identification and characterization of these two modes based on a non-equilibrium and self-consistent model that removes the usual hydro-dynamic assumption of electrons being in equilibrium with the local electric field. Through numerical examples, it is shown that RF nonthermal atmospheric plasmas in the /spl gamma/ mode are sustained predominately through ionization within the electrode sheath region and that secondary electrons are particularly important. On the other hand, RF nonthermal atmospheric plasmas in the /spl alpha/ mode are sustained by volume ionization both in the sheath region and in the quasi-neutral plasma bulk region. Similar to our experimental observations, current and voltage characteristics are very different in the two modes. A detailed comparison of the two modes is provid- d in terms of densities of charged particles, densities of excited species, mean electron energy, and electric field. These findings are useful for control and optimization of RF non-thermal atmospheric plasmas tailored for intended applications.

Characterization of plasma parameters and neutral particles in microwave and radio frequency discharges in the Toroidal Magnetized System

Characterization of plasma parameters and neutral particles in microwave and radio frequency discharges in the Toroidal Magnetized System

New Experimental Results Obtained using Microwave Reflectometry in HL-2 A Tokamak

Microwave Diagnostics System in the HL-2A Tokamak

Characterization of fast magnetosonic waves driven by compact toroid plasma injection along a magnetic field

Numerical and Experimental Characterization of RF Waves Propagation in Ion Sources Magnetoplasmas

The Torsatron TJ-K, an experiment for the investigation of turbulence in a toroidal low-temperature plasma

Characterization of the plasma in a radio-frequency magnetron sputtering system

Study of plasma heating in ohmically and auxiliary heated regimes in spherical tokamak Globus-M

Study of multicomponent plasma parameters in the pulsed reflex discharge

Multifield Measurement of Magnetic Fluctuation-Induced Particle Flux in a High-Temperature Toroidal Plasma

Numerical investigation of plasma properties for the microwave discharge ion thruster μ10 using PIC-MCC simulation

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Spectroscopic Density and Temperature Measurements and Modelling of a Discharge Plasma for Neutralized Ion-Beam Transport

Steady-State Plasmas in KT5D Magnetized Torus

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors

Characterization of Α and Γ Modes in Radio Frequency Nonthermal Atmospheric Plasmas

Preliminary study of plasma modes and electron-ion collisions in partially magnetized strongly coupled plasmas

Soft-X-Ray Emission, Plasma Equilibrium, and Fluctuation Studies on Madison Symmetric Torus

Plasma Characterization of a Test Setup of RF-driven Negative Ion Source by a Langmuir Probe System

Electron temperature, ion density and energy influx measurements in a tubular plasma reactor for powder surface modification