Abstract:Microelectromechanical system (MEMS) capacitive accelerometer for the Internet of Things applications is designed with open-loop structure rather than closed-loop structure to achieve low power consumption. In the open-loop structure, voltage control readout structure instead of charge control readout structure is preferred for low cost. However, the voltage control readout structure suffers from low power efficiency [in terms of figure of merit (FoM)] due to significant parasitic-capacitance-induced noise. In this article, the correlated double amplifying (CDA) technique is proposed to reduce the noise of the voltage control readout circuit with high power efficiency. Although traditional correlated double sampling (CDS) technique can also be used in readout circuit to reduce the parasitic-capacitance-induced noise, it sacrifices driving ability and bandwidth of the readout circuit, while CDA does not. The CDA technique adopts correlated amplifying to reduced noise without significant increase of power consumption. Thus, CDA technique leads to higher power efficiency. The CDA technique is demonstrated in a fully differential readout circuit fabricated in a 0.18-um CMOS process and tested with a sensing element from a commercial MEMS accelerometer. The measurement results show that noise floor of the readout circuit is 0.5 aF/root Hz and the noise floor of the whole system is 112 ug/root Hz , with a power consumption of 139 mu W and a bandwidth of 12.5 kHz. The full input range of +/- 4 g, an FoM(1) of 80 pJ, and an FoM(2) of 254 uW.ug/Hz are achieved.

A low-noise class AB amplifier fabricated by 180 nm BCD process for servo circuit of quartz flexible accelerometer

System Design of a Low Noise, Low Offset Instrumentation Amplifier with Chopper Stabilization

Application of the Quartz-flexure Accelerometer to the Development of Ultra-low Frequency Vibration National Primary Standard Device

Analysis And Design Of Inductorless Wideband Low-Noise Amplifier With Noise Cancellation Technique

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Noise Analysis and Parameter Optimization of Digital MEMS Accelerometer System

A 6.512-GHz Balanced Variable-Gain Low-Noise Amplifier With Frequency-Selective Gain Equalization Technique

Analysis and Design of Wideband Low Noise Amplifier with Digital Control

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

A Wideband BiCMOS Thermal Noise Canceling Low Noise Amplifier with Temperature Compensation

Note: Wide Band Amplifier for Quartz Tuning Fork Sensors with Digitally Controlled Stray Capacitance Compensation.

Design of New Amplifier in Capacitive Accelerometer

A low-noise CMOS interface circuit for closed-loop accelerometer

Correlated Double Amplifying Readout Technique for Low-Noise Power-Efficient MEMS Capacitive Accelerometer

A Novel Frequency Readout Method and Circuit for Navigation-Grade Vibrating Beam Accelerometers

A Low Noise Compact Class Ab Buffer Amplifier with Accurate Quiescent Current Control

Design and Fabrication of a Low-Noise CMOS Charge Sensitive Amplifier

A 27μW MEMS silicon oscillating accelerometer with bias instability and 10-μg/√Hz noise floor

A Novel Resonant Accelerometer Based on Quartz on Silicon (Qos)

A 0.23- $\mu \text{g}$ Bias Instability and 1- $\mu \text{g}/\surd $ Hz Acceleration Noise Density Silicon Oscillating Accelerometer with Embedded Frequency-to-Digital Converter in PLL

A 27 Mu W Mems Silicon Oscillating Accelerometer With 4-Mu G Bias Instability And 10-Mu G Root Hz Noise Floor