Abstract:Reliable transfer processes that enable manipulation of two-dimensional (2D) materials, e.g., transition metal dichalcogenides (TMDCs) and MXenes, from one substrate to another has been a necessity for successful device fabrication. With both mechanical exfoliation and chemical vapor deposition (CVD) widely used, a versatile, clean, deterministic, and yet simple transfer technique is highly needed. To address such need, we developed a transfer method that takes advantage of wettability contrast between interfaces without the use of sacrificial layers or chemical processes. More importantly, a setup was developed to carry out this transfer method with high sample selectivity and fine control of the position and orientation of transferred TMDC crystals, a feature required for fabrication of the devices based on vertical 2D heterostructures. Using both exfoliated and CVD grown materials and subsequent atomic force microscopy (AFM), photoluminescence (PL), confocal Raman and tip enhanced Raman spectroscopy (TERS) characterization, we ascertained the quality of interfaces resulting from the transfer process while preserving excellent 2D material integrity. PL and TERS maps revealed nanometer-scale heterogeneities in the interfaces of fabricated heterostructures, which should enable further perfection of the transfer technique. TERS/TEPL information were employed to identify areas suitable for nanodevice fabrication, making the reported transfer and characterization methods ideal for making high quality assembly of 2D heterostructure more accessible, which should facilitate exploration of vertical 2D heterostructures for applications in electronics, batteries, solar cells, and twistronics.

An ultra-high vacuum system for fabricating clean two-dimensional material devices

Construction of novel two-dimensional materials and heterostructures in ultra-high vacuum

Exfoliation of 2D van der Waals crystals in ultrahigh vacuum for interface engineering

Ultra-clean assembly of van der Waals heterostructures

The fabrication and physical properties of two-dimensional van der Waals heterostructures

A system to test 2D optoelectronic devices in high vacuum

Controlled Preparation of High Quality Bubble-Free and Uniform Conducting Interfaces of Vertical Van Der Waals Heterostructures of Arrays.

An in Situ Electrical Transport Measurement System under Ultra-High Vacuum

Ultrathin Ferrite Nanosheets for Room-Temperature Two-Dimensional Magnetic Semiconductors.

Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures

Recent progress in 2D van der Waals heterostructures: fabrication, properties, and applications

Suspended dry pick-up and flip-over assembly for van der Waals heterostructures with ultra-clean surfaces

Nano-ironing van der Waals Heterostructures Towards Electrically Controlled Quantum Dots

Controllable Preparation of 2D Vertical van der Waals Heterostructures and Superlattices for Functional Applications

An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers

Reliable wafer-scale integration of two-dimensional materials and metal electrodes with van der Waals contacts

Fabrication and Applications of van der Waals heterostructures

Highly Accurate, Reliable and Non-Contaminating Two-Dimensional Material Transfer System

Highly Efficient Bulk-Crystal-Sized Exfoliation of 2D Materials under Ultrahigh Vacuum

Facile fabrication of 2D material multilayers and vdW heterostructures with multimodal microscopy and AFM characterization

Constructing van der Waals heterostructures by dry-transfer assembly for novel optoelectronic device