Abstract:Due to the lightly damped resonance and intrinsic nonlinearities, it is difficult for the piezoactuated nanopositioning stage to realize high-bandwidth and high-accuracy control. To handle these limitations, in this work, a dual-loop control scheme based on state-feedback-based modal method is designed to both actively damp and stiffen the resonant mode and to suppress the effects of nonlinearities of the piezoactuated nanopositioning stage. In this scheme, the state-feedback-based modal controller is first designed in the inner loop to enlarge both the damping ratio and natural frequency of the first resonant mode. Then, a proportional–integral (PI) controller is utilized in the outer loop for eliminating the tracking errors caused by other disturbances and nonlinearities including hysteresis and creep. To maximize the control bandwidth of system under the proposed dual-loop scheme, an optimization method is thus proposed for simultaneously tuning the parameters of the inner and the outer loop controllers. Finally, to validate the proposed dual-loop control scheme, comparative experiments are carried out on a piezoactuated nanopositioning stage. Results demonstrate that the proposed control scheme improves the bandwidth of the system from 497 Hz (with PI control) and 1543 Hz (with a commonly used positive acceleration, velocity, and position damping control and a PI controller) to 6546 Hz, which is 664 Hz larger than the first resonant frequency of the original system, validating the effectiveness of the proposed dual-loop scheme on high-bandwidth control. Note to Practitioners—The demand of high-bandwidth and high-accuracy piezoactuated nanopositioning stages increases rapidly. However, the lightly damped resonance of the mechanism and the intrinsic nonlinearities of the piezoelectric actuator limit the tracking performance of the stage. A dual-loop control structure is adopted in this work to improve the tracking performance of the nanopositioning stage. Different from most of the vibration control methods proposed in the literature which aimed only at improving the damping ratio, a state-feedback-based modal controller is designed in the inner-loop for improving both the damping ratio and the stiffness of the system. This task is realized by re-placing the resonant poles of the system to the optimized location. The outer-loop controller adopts the high-gain PI control for eliminating the tracking errors. More importantly, in order to realize the high-bandwidth and high-accuracy control, a numerical optimization method is proposed for simultaneously tuning the parameters of the controllers in inner and outer loops. The controller design is simple, and it can be applied to other systems with second or higher order in which the first resonant mode dominates the system dynamics.

Decoupled tracking and damping control of piezo-actuated nanopositioner enabled by multimode charge sensing

Comprehensive study of charge-based motion control for piezoelectric nanopositioners: Modeling, instrumentation and controller design

Charge Controller with a Novel Hysteresis Disturbance Observer for High-Accuracy Trajectory Tracking of Piezoelectric Actuators

Principle, implementation, and applications of charge control for piezo-actuated nanopositioners: A comprehensive review

Positive Position Feedback Based High-Speed Tracking Control Of Piezo-Actuated Nanopositioning Stages

A Charge Controller for Synchronous Linear Operation of Multiple Piezoelectric Actuators.

Damping and Tracking Control of Nanopositioning Stages with Double Delayed Position Feedback

High-Bandwidth Tracking Control of Piezoactuated Nanopositioning Stages Via Active Modal Control

Modeling and control of a piezoelectric-actuated nano-positioner: An hierarchical composite anti-disturbance control approach

A fractional-order active damping control approach for piezo-actuated nanopositioning stages

A design of novel damping controller combined with PID for nanopositioners

Damping Control of Piezo-Actuated Nanopositioning Stages with Recursive Delayed Position Feedback

Nonlinearities compensation of a parallel piezostage using discrete-time sliding mode predictive control with decoupling and damping properties

Integral back-stepping active disturbance rejection control for piezoelectric stick-slip drive nanopositioning stage

Design of Composite Disturbance Observer and Continuous Terminal Sliding Mode Control for Piezoelectric Nanopositioning Stage

Hierarchical Antidisturbance Control of a Piezoelectric Stage via Combined Disturbance Observer and Error-Based ADRC

Dual mode predictive control for ultrafast piezoelectric nanopositioning stages

Modeling and active disturbance rejection control for a piezoelectric-actuator driven nanopositioner

High-Precision Control of Piezoelectric Nanopositioning Stages Using Hysteresis Compensator and Disturbance Observer

Design, Assessment, and Trajectory Control of a Novel Decoupled Robotic Nanomanipulator

High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input shaper