CMOS-Based Tactile Microsensor for Medical Instrumentation

T. Salo,Kay-Uwe Kirstein,T. Vancura,Henry Baltes
DOI: https://doi.org/10.1109/JSEN.2006.886902
IF: 4.3
2007-01-22
IEEE Sensors Journal
Abstract:This paper presents a novel tactile sensing device aimed at a variety of medical instrumentation applications, including extravascular blood pressure monitoring, distinguishing a coronary artery from a nearby running cardiac vein, and locating the site of a coronary occlusion. The monolithically integrated microsensor is fabricated using an industrial CMOS process with a limited number of postmicromachining steps. Using the tonometric principle, an array of membrane capacitors can detect and monitor the pulsatile pressure variations inside a blood vessel
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