Abstract:It is known that in very-high-frequency capacitively coupled plasmas (VHF CCPs), the higher harmonics generated by nonlinear sheath motion can enhance the standing wave effect (SWE), which can lead to center-peaked plasma density profiles. In this work, an improved nonlinear electromagnetic model incorporating a transmission line model, an electron momentum balance model, a bulk plasma model, a collisionless nonlinear numerical sheath model, and an ion Monte-Carlo collision (MCC) model is developed to study the effects of low-frequency (LF) voltage VL on the nonlinear standing wave excitation, plasma uniformity, and ion energy and angular distribution functions (IEDFs and IADFs) in dual-frequency (DF) asymmetric capacitive argon discharges at relatively low pressure of 3 Pa. The plasma diffusion in the radial direction and ion dynamics within the LF oscillating sheath are self-consistently considered. The LF voltage VL at 2 MHz varies from 0 to 700 V while the high-frequency (HF) voltage VH at 60 MHz is fixed at 100 V. Simulation results indicate that without the addition of an LF source (i.e. VL = 0 V), there are a considerable number of high-order harmonics with short wavelengths, leading to significant SWE and central peak in the radial plasma density profile. Nevertheless, the high-order harmonic excitations tend to be weakened and merely occur around the phase of the full LF sheath collapse due to a shorter characteristic damping time of the surface waves as VL increases. This, combined with increased surface wavelengths of both the driving frequency and the higher harmonics at a higher VL, leads to suppressed standing waves and improved plasma uniformity. Meanwhile, the simulations show that both the low and the high energy peaks of IEDF move towards higher energies, and the energy peak separation width ΔE becomes wider with the increase of VL. The IEDF at the radial center of the powered electrode exhibits a broader ΔE than that at the edge. For the IADF, an increased VL results in more ions incident on the electrode with a smaller deflection angle. Because of a thinner sheath and a higher sheath voltage at the electrode center, the peak value of IADF at the electrode center is greater than that at the edge.

Effect of Multi-Frequency Excitation on Dust Particle Charging in Weakly Collisional Radio-Frequency Capacitive Discharge

Numerical study on dust particle charging and dynamics in continuous and pulsed radio frequency argon discharges

The effect of dust charge variation, due to ion flow and electron depletion, on dust levitation

2-D Fluid Simulation of Dual-Frequency Capacitively Coupled Plasma

Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges

Effects of collision enhanced charging on dust crystal

Kinetic Simulation of He radio frequency capacitive coupled plasma

Numerical investigation of sheath characteristics for electronegative magnetized plasma and dust charging

Electron Heating Enhancement Due to Plasma Series Resonance in A Capacitively Coupled Rf Discharge: Electrical Modeling and Comparison to Experimental Measurements

Reconstruction Of Ion Energy Distribution Function In A Capacitive Rf Discharge

Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies

Gravitational force-induced changes in collisionless shock wave behavior in a charge-varying nonthermal dusty plasma

The collisional study of EIC waves in a magnetized dusty plasma with the inclusion of a DC electric field

A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms

Charging Effects on Temporal and Spatial Evolution of the Dusty Plasma Sheath in Plasma Source Ion Implantation

Controlling the Density of Plasma Species in Ar/CF4 Radiofrequency Capacitively Coupled Plasma Discharges

Dust charging in dynamic ion wakes

Influence of plasma particle flow on dust grain charging and on particle number density

Fluid modeling on effects of discharge parameters on ionization in capacitive radio frequency argon discharges at low pressure

Hybrid simulation of instabilities in capacitively coupled RF CF 4 /Ar plasmas driven by a dual frequency source

Simulation of DC glow discharge plasma with radially free moving dust particles