Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network

Chin-Kai Chang,Chao-Wei Yang,Chin Kai Chang,Chao Wei Yang
DOI: https://doi.org/10.1364/oe.517201
IF: 3.8
2024-02-24
Optics Express
Abstract:Chin-Kai Chang, Chao-Wei Yang Profile measurements of structures with a high aspect ratio and subwavelength features (HARSW) can be achieved using transmission electron ... [Opt. Express 32, 8389-8396 (2024)]
optics
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