A synchrotron-based kilowatt-level radiation source for EUV lithography

Bocheng Jiang,Chao Feng,Changliang Li,Zhenghe Bai,Weishi Wan,Dao Xiang,Qiang Gu,Kun Wang,Qinglei Zhang,Dazhang Huang,Senyu Chen
DOI: https://doi.org/10.1038/s41598-022-07323-z
IF: 4.6
2022-02-28
Scientific Reports
Abstract:Abstract A compact damping ring with a limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the storage ring is modulated by a 257 nm wavelength seed laser with the help of the angular-dispersion-induced micro-bunching method (Feng and Zhao in Sci Rep 7:4724, 2017), coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.
multidisciplinary sciences
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