Abstract:In lithography wafer stage systems, laser interferometers are one of the most important precision measuring instruments. The homodyne interferometer is based on the single-frequency laser interference effect and is able to provide displacement resolution smaller than sub-nanometer. However, its accuracy is affected by ac amplitude variation, dc offset, and quadrature-phase error of the interference signal. In this article, a high-precision signal processing method is proposed, which can make full use of the redundant multiphase information, obtain higher accuracy than the quadrature interferometer, and is more practical than the existing signal processing method in multiphase interferometers because it can approach the theoretical upper limit of accuracy for any number of detection signals. In this method, multiple detectors are installed on the interference optical path, and the Gauss–Newton algorithm is used to solve nonlinear equations containing redundant information. All the parameters are calibrated simultaneously, so the calculation accuracy is improved by avoiding the error transfer in different calculation processes. The simulation shows that using the above methods, when the noise level is 66 dB, the relative errors of calibrated parameters are less than 0.03%, the standard deviation (STD) of the phase error is $5.13 \times 10^{-4}$ rad, and the equivalent STD of the displacement error is 15.9 pm. In the experiment, the root-mean-square error (RMSE) of the displacement is 0.846 nm under the signal noise level of 37.4 dB.

An analytic, efficient and optimal readout algorithm for compact interferometers based on deep frequency modulation

Deep frequency modulation interferometry

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Experimental demonstration of deep frequency modulation interferometry

Fourier transform with matched non-linear frequency modulation in femtosecond laser ranging with imbalanced dispersion

Readout for intersatellite laser interferometry: Measuring low frequency phase fluctuations of high-frequency signals with microradian precision

Readout for intersatellite laser interferometry: Measuring low frequency phase fluctuations of HF signals with microradian precision

A Signal Processing Method for Homodyne Laser Interferometer Based on Model Parameter Self-Calibration with Redundant Information

Advanced phasemeter for deep phase modulation interferometry.

High-Speed and High-Resolution Low-Coherence Interferometric Demodulation Without Phase Jumps

Sinusoidal phase-modulating self-mixing interferometer with nanometer resolution and improved measurement velocity range

Nonlinearities in Long-Range Compact Michelson Interferometers

Converting the signal-recycling cavity into an unstable optomechanical filter to enhance the detection bandwidth of gravitational-wave detectors

Constant amplitude modulation heterodyne interferometry

Phase Measurement Method Based on Digital Dual Frequency Comb for High-Precision High-Speed Heterodyne Interferometry

Laser-Frequency Stabilization via a Quasimonolithic Mach-Zehnder Interferometer with Arms of Unequal Length and Balanced dc Readout

Signal generation in dynamic interferometric displacement detection

Fringe-to-pulse Counting Demodulation of a Laser Interferometer for Primary Vibration Calibration

Dimensionality-reduced iterative ellipse fitting algorithm for fiber-optic sinusoidal frequency modulation interferometer quadrature signal correction

Phasemeter core for intersatellite laser heterodyne interferometry: modelling, simulations and experiments

Dual balanced readout for scattered light noise mitigation in Michelson interferometers