Investigation of sensing performances of thick-film resistors sintered on fluorophlogopite glass-ceramic substrates

Ming Wen,Xinchun Guan
DOI: https://doi.org/10.1016/j.sna.2024.115248
IF: 4.291
2024-03-05
Sensors and Actuators A Physical
Abstract:Strain gauges made of thick-film resistors (TFRs) offer a promising solution for monitoring the structural health of civil engineering projects, owing to their exceptional durability and stability. To address the issue of strain mismatch between alumina substrates and concrete materials, fluorophlogopite glass-ceramic (FGC), which has a low elastic modulus and good machinability, was utilized as a substrate for thick-film resistors. Compatibility between resistor pastes and substrates should be considered, as the substrate can significantly impact the performance of thick-film resistors. TFRs with varying concentrations of RuO 2 were screen printed and fired at different temperatures on both FGC and 96% Al 2 O 3 (as a control) substrates. The sheet resistivity, temperature coefficient of resistance (TCR), and gauge factor (GF) of TFRs were evaluated. The strain sensing performances of TFRs on FGC evaluated under compressive loading. The results indicate that TFRs on FGC substrates exhibit higher hot TCRs, lower sheet resistivities, and lower gauge factors than those on Al 2 O 3 substrates under typical firing conditions of 850°C for 10 minutes. As the concentration of RuO 2 increases, the differences in properties between TFRs on the two substrates become less pronounced. Microstructural analyses of the interface between the resistor layer and substrate indicate that changes in properties of TFRs on FGC substrates are primarily attributed to variations in RuO 2 concentration and glass phase composition, which result from interactions between the resistor layer and FGC substrate. The interaction between the FGC substrate and the resistor layer can be significantly alleviated by lowering the firing temperature from 850°C to 750°C, resulting in TFRs on FGC substrates with properties comparable to those on alumina substrates. The TFRs on FGC exhibit favorable sensitivity, linearity, repeatability, and hysteresis within the input compression strain range of 0–3043με, thus showcasing significant potential for application in structural health monitoring (SHM) in civil engineering.
engineering, electrical & electronic,instruments & instrumentation
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