3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation

C. Mendez,C. Louis,S. Paquay,P. De Vincenzo,I. Klapka,V. Rochus,F. Iker,Nicolas André,J. -P. Raskin,J.-P. Raskin
DOI: https://doi.org/10.48550/arXiv.0711.3277
2007-11-21
Other Computer Science
Abstract:MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEMS such as, for instance, thermal actuators and flow sensors. The numerical simulations of these microsystems are presented. Structural and thermal parts have to be strongly coupled for correctly describing the fabrication process and for simulating the behavior of these 3-D SOI MEMS.
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