Comment on "Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit"

Ole Steuernagel
DOI: https://doi.org/10.48550/arXiv.quant-ph/0305042
2003-05-08
Quantum Physics
Abstract:Comment on "Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit" The effective absorption rates in quantum lithography are very low.
What problem does this paper attempt to address?