The lift pin assembly

邦妮·T·基亚,阿拉维德·米亚尔·卡马斯,振雄·马修·蔡,维诺德·孔达·普拉斯,贾勒帕里·拉维,曼朱纳塔·科普帕
2015-05-28
Abstract:Embodiments of lift pin assemblies are provided herein. In some embodiments, a lift pin assembly includes an elongate base formed of a first material and having a first feature formed in a distal end of the base to interface with and removably support a tip; and a tip formed of a second material different than the first material and having a support surface on a first side of the tip and an opposing second side of the tip, wherein the opposing second side includes a second feature to mate with the first feature of the base to removably retain the tip on the distal end of the base.
Engineering,Materials Science
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