Abstract:Strong field confinement, long-lifetime resonances, and slow-light effects suggest that metasurfaces are a promising tool for nonlinear optical applications. These nanostructured devices have been utilized for relatively high efficiency solid-state high-harmonic generation platforms, four-wave mixing, and Raman scattering experiments, among others. Here, we report the first alldielectric metasurface to enhance harmonic generation from a surrounding gas, achieving as much as a factor of 45 increase in the overall yield for Argon atoms. When compared to metal nanostructures, dielectrics are more robust against damage for high power applications such as those using atomic gases. We employ dimerized highcontrast gratings fabricated in silicon-on-insulator that support bound states in the continuum, a resonance feature accessible in broken-symmetry planar devices. Our 1D gratings maintain large mode volumes, overcoming one of the more severe limitations of earlier device designs and greatly contributing to enhanced third- and fifth-harmonic generation. The interaction lengths that can be achieved are also significantly greater than the 10’s of nm to which earlier solid-state designs were restricted. We perform finite-difference time-domain simulations to fully characterize the wavelength, linewidth, mode profile, and polarization dependence of the resonances. Our experiments confirm these predictions and are consistent with other nonlinear optical properties. The tunable wavelength dependence and quality factor control we demonstrate in these devices make them an attractive tool for the next generation of high-harmonic sources, which are anticipated to be pumped at longer wavelengths and with lower peak power, higher repetition rate lasers.

Amplification of high harmonics in 3D semiconductor waveguides

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Overcoming the quantum limit of optical amplification in monolithic waveguides

Beating absorption in solid-state high harmonics

High harmonic generation from a subwavelength dielectric resonator

Wide-bandgap optical materials for high-harmonics generation at the nanoscale

Enhanced High-Harmonic Generation from an All-Dielectric Metasurface

High-harmonic generation from subwavelength silicon films

Resonant, broadband and highly efficient optical frequency conversion in semiconductor nanowire gratings at visible and UV wavelengths

Enhancing the efficiency of high-order harmonics with two-color non-collinear wave mixing in silica

Third harmonic generation enhancement and wavefront control using a local high-Q metasurface

Overcoming the absorption limit in high-harmonic generation from crystals

Enhanced harmonic generation in gases using an all-dielectric metasurface

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Low-power continuous-wave second harmonic generation in semiconductor nanowires

Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics

Nonperturbative Generation of Harmonics by Nanometer-Scale Localized Electronic States on the Surface of Bulk Materials and Nano-Films

Near-Field Enhancement of Optical Second Harmonic Generation in Hybrid Gold-Lithium Niobate Nanostructures

Efficient second harmonic generation by harnessing bound states in the continuum in semi-nonlinear etchless lithium niobate waveguides

High Harmonic Generation from Laser-Induced Plasmas of Ni-Doped CsPbBr 3 Nanocrystals: Implications for Extreme Ultraviolet Light Sources

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions