Abstract:We design and fabricate shallow-etched periodically poled lithium niobate waveguide to realize highly-efficient broadband spontaneous parametric down-conversion~(SPDC) on nanophotonic chip. The shallow-etched waveguide is capable to tolerate the non-uniformities of waveguide width induced by fabrication imperfections, enabling generation of photon pairs with high count rate and bandwidth. We demonstrate photon-pair generation with a high brightness of 11.7~GHz/mW and bandwidth of 22~THz, in a 5.7-mm-long PPLN waveguide. The generated photon pairs exhibit strong temporal correlation with a coincidence-to-accidental ratio up to 16262$\pm$850. Our results confirm the feasibility of shallow etching in fabrication of efficient SPDC device on platform of lithium niobate on insulator, and benefit quantum information processing with broadband photon source.

What problem does this paper attempt to address?

This paper aims to solve the problem of efficiently generating broadband photon pairs through Spontaneous Parametric Down - Conversion (SPDC). Specifically, the research objective is to design and fabricate shallow - etched periodically poled lithium niobate (PPLN) waveguides on nanopho tonic chips to achieve high - efficiency broadband SPDC. The main challenges mentioned in the paper include: 1. **Efficient Generation of Broadband Photon Pairs**: Although traditional deeply - etched PPLN waveguides can provide high - mode confinement, they have extremely high process requirements and are prone to scattering losses due to side - wall roughness. Shallow - etched PPLN waveguides can reduce scattering losses and increase tolerance to waveguide geometric size inhomogeneity during the manufacturing process, thereby achieving efficient photon - pair generation. 2. **High Brightness and Broad Bandwidth**: The paper shows that the brightness of photon - pair generation in a 5.7 - millimeter - long PPLN waveguide reaches 11.7 GHz/mW and the bandwidth reaches 22 THz, which is a remarkable achievement in current research. 3. **Strong Temporal Correlation**: The generated photon pairs exhibit strong temporal correlation, with a Coincidence - to - Accidental Ratio (CAR) as high as 16262 ± 850, indicating a very high purity of the photon pairs. 4. **Engineered Group Velocity Dispersion (GVD)**: In order to achieve broadband SPDC, near - zero dispersion (GVD ≈ 0) needs to be achieved near the center of the SPDC spectrum. The paper achieves this goal through careful design of the waveguide geometry. Through these technical means, the paper successfully demonstrates the feasibility of shallow - etched PPLN waveguides in efficiently generating broadband photon pairs, which is of great significance for broadband light source applications in quantum information processing.

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