Full Silicon Pillar-based 1D Optomechanical cavities

Juliana Jaramillo-Fernandez,Martin Poblet,David Alonso-Tomás,Christian Vinther Bertelsen,Elena López-Aymerich,Daniel Arenas-Ortega,Winnie E. Svendsen,Néstor E. Capuj,Albert Romano-Rodríguez,Daniel Navarro-Urrios

2024-05-29

Abstract:Nanomechanical resonators can serve as ultrasensitive, miniaturized force probes. While vertical structures like nanopillars are ideal for this purpose, transducing their motion is challenging. Pillar-based photonic crystals (PhCs) offer a potential solution by integrating optical transduction within the pillars. However, achieving high-quality PhCs is hindered by inefficient vertical light confinement. Here, we present a full-silicon 1D photonic crystal cavity based on nanopillars as a new platform with great potential for applications in force sensing and biosensing areas. Its unit cell consists of a silicon pillar with larger diameter at its top portion than at the bottom, which allows vertical light confinement and an energy bandgap in the near infrared range for transverse-magnetic (TM) polarization. We experimentally demonstrate optical cavities with Q-factors exceeding 1e3 constructed by inserting a defect within a periodic arrangement of this type of pillars. Given the fact that that each nanopillar naturally behaves as a nanomechanical cantilever, the fabricated geometries are excellent optomechanical (OM) photonic crystal cavities in which the mechanical motion of each nanopillar composing the cavity can be optically transduced. These novel geometries display enhanced mechanical properties, cost-effectiveness, integration possibilities, and scalability, and opens and new path in front of the widely used suspended Si beam OM cavities made on silicon-on-insulator.

Optics,Applied Physics

What problem does this paper attempt to address?

The problems that this paper attempts to solve mainly focus on two aspects:

1. **Vertical light confinement and high optical quality factor**: Traditional one - dimensional photonic crystal waveguides based on nanopillars (1D - PhCW) have difficulties in achieving efficient vertical light confinement, resulting in the difficulty of obtaining high - quality photonic crystal cavities. By designing an all - silicon nanopillar with a specific geometric structure, the paper successfully solves this problem, achieving effective vertical confinement of transverse magnetic (TM) - polarized light in the near - infrared region, and experimentally demonstrating an optical cavity with an optical quality factor (Q - factor) exceeding \(10^3\).

2. **Efficient optical conversion of nanopillar mechanical motion**: Nanopillars, as mechanical resonators, have received extensive attention as extremely sensitive force sensors in biological applications. However, due to their horizontal layout, the traditional electrode method is not suitable for detecting the motion of nanopillars, and high - resolution complex optical imaging techniques are required for characterization. The paper proposes a new 1D - PhCW geometric configuration that can simultaneously serve as a mechanical resonator and an optical cavity, directly converting the mechanical motion of nanopillars by optical methods, achieving efficient force - sensing and biosensing applications.

In summary, the main goal of the paper is to develop a new all - silicon nanopillar one - dimensional photonic crystal waveguide platform. This platform can not only effectively solve the problems of vertical light confinement and improving the optical quality factor, but also achieve efficient optical conversion of nanopillar mechanical motion, providing new solutions for the fields of force - sensing and biosensing.