Abstract:We present an advanced scanning probe microscopy system enhanced with artificial intelligence (AI-SPM) designed for self-driving atomic-scale measurements. This system expertly identifies and manipulates atomic positions with high precision, autonomously performing tasks such as spectroscopic data acquisition and atomic adjustment. An outstanding feature of AI-SPM is its ability to detect and adapt to surface defects, targeting or avoiding them as necessary. It's also engineered to address typical challenges such as positional drift and tip apex atomic variations due to the thermal effect, ensuring accurate, site-specific surface analyses. Our tests under the demanding conditions of room temperature have demonstrated the robustness of the system, successfully navigating thermal drift and tip fluctuations. During these tests on the Si(111)-(7x7) surface, AI-SPM autonomously identified defect-free regions and performed a large number of current-voltage spectroscopy measurements at different adatom sites, while autonomously compensating for thermal drift and monitoring probe health. These experiments produce extensive data sets that are critical for reliable materials characterization and demonstrate the potential of AI-SPM to significantly improve data acquisition. The integration of AI into SPM technologies represents a step toward more effective, precise and reliable atomic-level surface analysis, revolutionizing materials characterization methods.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to achieve high - precision atomic - level surface analysis at room temperature. Specifically, the authors have developed an enhanced scanning probe microscope system (AI - SPM), which integrates artificial intelligence technology and aims to autonomously perform measurement tasks at the atomic scale. The main problems to be solved include: 1. **Thermal Drift Compensation**: Under room - temperature conditions, due to the influence of thermal effects, the relative position between the probe of the scanning probe microscope (SPM) and the sample will change, resulting in image distortion and measurement instability. The AI - SPM system ensures the continuity and accuracy of measurement by real - time monitoring and compensating for thermal drift. 2. **Probe Tip State Optimization**: Thermal effects at room temperature can also cause changes in the atoms at the probe tip, affecting the image quality. The AI - SPM system can automatically detect the state of the probe tip and repair it when necessary to maintain high - resolution imaging capabilities. 3. **Defect Detection and Treatment**: Surface defects (such as adsorbates and steps) can affect the accuracy of measurement. The AI - SPM system can identify these defects and avoid or measure them as needed. 4. **Automated Data Acquisition**: Traditional SPM experiments usually require manual operation, which is time - consuming and labor - intensive. The AI - SPM system realizes automated data acquisition, significantly improving the efficiency and reliability of data acquisition. 5. **Atomic - level Measurement at Specific Locations**: Under room - temperature conditions, achieving atomic - level measurement at specific locations is very challenging. The AI - SPM system can autonomously identify and locate specific atomic sites and perform high - precision measurements by integrating multiple deep - learning models. Through these improvements, the AI - SPM system can achieve high - precision and reliable atomic - level surface analysis at room temperature, providing a powerful tool for research in the field of materials science.

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