Structured illumination microscopy with extreme ultraviolet pulses

R. Mincigrucci,E. Paltanin,J.-S. Pelli-Cresi,F. Gala,E. Pontecorvo,L. Foglia,D. De Angelis,D. Fainozzi,A. Gessini,D. S. P. Molina,O. Stranik,F. Wechsler,R. Heintzmann,G. Ruocco,F. Bencivenga,C. Masciovecchio

2024-03-28

Abstract:The relentless pursuit of understanding matter at ever-finer scales has pushed optical microscopy to surpass the diffraction limit and produced the super-resolution microscopy which enables visualizing structures shorter than the wavelength of light. In the present work, we harnessed extreme ultraviolet beams to create a sub-{\mu}m grating structure, which was revealed by extreme ultraviolet structured illumination microscopy. This achievement marks the first step toward extending such a super-resolution technique into the X-ray regime, where achieving atomic-scale resolution becomes a charming possibility.

Optics,Other Condensed Matter

What problem does this paper attempt to address?

The main objective of this paper is to demonstrate how to achieve super-resolution microscopy using extreme ultraviolet (EUV) pulses and to explore the possibility of extending this technique to the X-ray range.

Specifically, the research team created sub-micron level grating structures on the sample by crossing EUV beams and observed these structures using EUV structured illumination microscopy (SIM). Through this method, they successfully increased the resolution by nearly 3 times, allowing them to observe fine features that were previously invisible. This is the first time that such super-resolution microscopy has been achieved using a pulsed light source.

Key points mentioned in the paper include:
- Using EUV pulses to generate structured illumination, which can overcome the traditional Abbe limit, i.e., the resolution limit of optical microscopes.
- The structured illumination used in the experiment interacts with the periodic structure of the sample itself, producing moiré fringes. The spacing of these fringes is large enough to be captured by visible light microscopes.
- The researchers reconstructed the images using a Bayesian statistical method, which allows for super-resolution image reconstruction in the presence of fluctuations in the light source's frequency and phase.
- The paper discusses the future possibility of using X-ray structured illumination and X-ray fluorescence imaging. These techniques could further improve the resolution to the atomic scale and enable the observation of dynamic changes in samples on ultrafast time scales.

This work marks a significant advancement in super-resolution microscopy technology, particularly for applications in imaging at the nanoscale and even atomic scale in the future.