Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification
Daniel Pérez Lozano,Massimo Mongillo,Xiaoyu Piao,Sebastien Couet,Danny Wan,Yann Canvel,A. M. Vadiraj,Tsvetan Ivanov,Jeroen Verjauw,Rohith Acharya,Jacques Van Damme,Mohiyaddin A. Fahd,Julien Jussot,Pallavi Puttarame Gowda,Antoine Pacco,Bart Raes,Joris Van de Vondel,Iuliana Radu,Bogdan Govoreanu,Johan Swerts,Anton Potocnik,Kristiaan DeGreve
DOI: https://doi.org/10.1088/2633-4356/ad4b8c
2024-05-15
Materials for Quantum Technology
Abstract:The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric loss at different interfaces. α-tantalum is a superconductor that has proven effective in reducing dielectric loss and improving device performance due to its thin low-loss oxide. Here, we demonstrate the fabrication of high-quality factor α-tantalum coplanar-waveguide resonators directly on pristine 300 mm silicon wafers over a variety of metal deposition conditions and perform a comprehensive material and electrical characterization study. Additionally, we apply a surface treatment based on hydrofluoric acid that allows us to modify different resonators surfaces, leading to a reduction in two-level system (TLS) loss in the devices by a factor of three. This loss reduction can be entirely attributed to the removal of surface oxides. Our study indicates that large scale manufacturing of low-loss superconducting circuits should indeed be feasible and suggests a viable avenue to materials-driven advancements in superconducting circuit performance.