Abstract:Inductively coupled plasma or ICP sources form a basis for multiple applications ranging from semiconductor fabrication to reliable heating systems for tokamak machines. To meet the functional requirements, ICP sources need efficient plasma formation utilizing the various input parameters. Operation of ICP sources is a complex and challenging task since it involves scanning a wide multi-dimensional parameter space involving filament bias, radio frequency (RF) power, gas pressure, matching parameters, and other system configurations. The foremost challenge is to maximize the coupling of RF power in the ion source for efficient plasma formation. Standard ICP sources use a matching network that consists of variable capacitors to compensate for plasma inductance to enable maximum power coupling. Identification of an accurate set of matching parameters for high power sources is a complex task and is generally driven by operator experience which is established after years of operations. Due to these challenges, recent developments in the area of machine learning can be utilized for identifying the underlying model function to make accurate predictions and explore an alternative approach to the existing Physics-electrical models developed for the estimation of matching parameters for plasma sources. The present work attempts to perform a data-driven model discovery for the identification of appropriate matching parameters utilizing machine learning algorithms. In this work, ROBIN, a high-power ICP source that operates with a 1MHz, 100 kW RF generator is considered which has been operational since 2011 and has generated a considerable database. This database can be utilized for training/developing data-driven models for the estimation of matching parameters for ensuring better power coupling. The paper describes the development of two data-driven regression models for predicting the coupling efficiency in terms of power factor (denoted by Cos φ ) and the capacitor values based on input parameters utilizing well known algorithms such as support vector machine, random forest and neural networks. Emphasis has been laid on developing the models using parameters that are tuneable externally. Also, the effect of system configurations on parameter prediction is investigated. The developed machine learning-based models have achieved test accuracy scores of 0.93 and 0.91 for predicting Cos φ and capacitor values respectively. The paper presents the training and optimization process for various machine and deep learning algorithms in detail.

Multi-domain analysis and prediction of the light emitted by an inductively coupled plasma jet

Multi-physics modeling of the long-term evolution of helium plasma exposed surfaces

Numerical Simulation of Heat Transfer and Fluid Flow of a Non-Equilibrium Argon Plasma Jet with Confined Wall

Multi-diagnostic approach to energy transport in an atmospheric pressure helium-oxygen plasma jet

Three-Dimensional Numerical Simulation of Inductively Coupled Plasma Generator

Multi-physics Modeling of a Spark Plasma Jet Igniter

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Calculations of flow field and heat exchange properties in high-power high-enthalpy inductively coupled plasma generator

Investigation on a Low Pressure Plasma Jet in an Inductively Coupled Plasma

Generation of Long Laminar Plasma Jets: Experimental and Numerical Analyses

A Parametric Study of a Cold Atmospheric Plasma Jet

In situ multi-band apparent emissivity measurements of aerospace materials in inductively coupled plasma flows

Thermal Analysis of Inductively Coupled Atmospheric Pressure Plasma Jet and Its Effect for Optical Processing

Modelling of plasma facing component erosion, impurity migration, dust transport and melting processes at JET-ILW

Dynamics and density distributions in a capillary-discharge waveguide with an embedded supersonic jet

Gas-surface interactions in a large-scale inductively coupled wind tunnel investigated by emission/absorption spectroscopy

Matching parameter estimation for high power Inductively coupled plasma sources using Machine learning techniques

Dynamics of the Gas Flow Turbulent Front in Atmospheric Pressure Plasma Jets

Thermodynamic Parameters and Energy Transfer Analysis of High Enthalpy Inductively Coupled Plasma

Laboratory simulation of astrophysical jets within facilities of Plasma Focus type

Particle Image Velocimetry and Total Temperature Characterization of Arc-Heated Mach 4.5 Free Jet