Abstract:Abstract Integrated photonics facilitates extensive control over fundamental light–matter interactions in manifold quantum systems including atoms 1 , trapped ions 2,3 , quantum dots 4 and defect centres 5 . Ultrafast electron microscopy has recently made free-electron beams the subject of laser-based quantum manipulation and characterization 6–11 , enabling the observation of free-electron quantum walks 12–14 , attosecond electron pulses 10,15–17 and holographic electromagnetic imaging 18 . Chip-based photonics 19,20 promises unique applications in nanoscale quantum control and sensing but remains to be realized in electron microscopy. Here we merge integrated photonics with electron microscopy, demonstrating coherent phase modulation of a continuous electron beam using a silicon nitride microresonator. The high-finesse ( Q 0 ≈ 10 6 ) cavity enhancement and a waveguide designed for phase matching lead to efficient electron–light scattering at extremely low, continuous-wave optical powers. Specifically, we fully deplete the initial electron state at a cavity-coupled power of only 5.35 microwatts and generate >500 electron energy sidebands for several milliwatts. Moreover, we probe unidirectional intracavity fields with microelectronvolt resolution in electron-energy-gain spectroscopy 21 . The fibre-coupled photonic structures feature single-optical-mode electron–light interaction with full control over the input and output light. This approach establishes a versatile and highly efficient framework for enhanced electron beam control in the context of laser phase plates 22 , beam modulators and continuous-wave attosecond pulse trains 23 , resonantly enhanced spectroscopy 24–26 and dielectric laser acceleration 19,20,27 . Our work introduces a universal platform for exploring free-electron quantum optics 28–31 , with potential future developments in strong coupling, local quantum probing and electron–photon entanglement.

Quantum Wavefront Shaping with a 48-element Programmable Phase Plate for Electrons

Phase encoding for sharper focus of the azimuthally polarized beam.

Surface wave illumination Fourier ptychographic microscopy.

Nanostructured-membrane electron phase plates

Integrated photonics enables continuous-beam electron phase modulation

Sculpturing the Electron Wave Function

Coherent electron phase-space manipulation by combined elastic and inelastic light-electron scattering

Shaping electron beams for the generation of innovative measurements in the (S)TEM

A Laser Phase Plate for Transmission Electron Microscopy

Quantum coherent optical phase modulation in an ultrafast transmission electron microscope

THz Beam Shaping Based on Diffractive Transformation for Forming Patterned Simulation Lightfields and Wavefronts

Ultrafast Transverse Modulation of Free Electrons by Interaction with Shaped Optical Fields

Nanometer-scale electron beam shaping with thickness controlled and stacked nanostructured graphite

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Three-dimensional Stacking of Phase Plates for Advanced Electron Beam Shaping

Towards an optimum design for electrostatic phase plates

Electrostatic interference control of a high-energy coherent electron beam using a three-element Boersch phase shifter

Computing Liquid‐Crystal Photonics Platform Enabled Wavefront Sensing

Experimental Analysis of a Wavefront Coding System with a Phase Plate in Different Surfaces

Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining

Atomic Resolution Phase Contrast Imaging and In-Line Holography Using Variable Voltage and Dose Rate.