Abstract:Scanning electron microscopy (SEM) enables microstructure characterization at multi-scale, having potential to quantify strain distribution across multiple fields of view (FOVs) and exploring coordinated relationships among the deformations of multi-scale microstructures. Optimizing distribution of multi-scale speckles is crucial for achieving high precision and efficiency in digital image correlation (DIC) computations. In this work, a multi-scale strain measurement method is proposed for in-situ SEM mechanical experiments, which relies on an uncomplicated multi-scale speckle preparation method. Multi-scale speckle preparation can be achieved by the combination of spin-coating and magnetron sputtering. By using micro- and macro-speckle, multi-scale strain calculations can be achieved during the in-situ SEM mechanical loading. The InSn macro-speckle is composed of controllable-sized InSn nanoscale speckles, ensuring that the accuracy of DIC measurements in the microscopic regions are not compromised by the coverage of macro-speckles in the testing region. In regions covered exclusively by SiO2 nano-speckles, in-situ SEM mechanical loading allows for the acquisition of high-resolution DIC (HR-DIC) and electron backscatter diffraction (EBSD) data from the same region and under the same deformation state. Experiments are conducted to illustrate the functionality and utility of the multi-scale speckles. Such experimental analyses offer an opportunity to further explore multi-scale strain heterogeneity in some advanced structural materials and provide reliable experimental verification for material mechanics simulations.

Two-Dimensional Strain Mapping with Scanning Precession Electron Diffraction: An Investigation into Data Analysis Routines

Scanning electron diffraction tomography of strain

Surface Patterning for Multi-Scale Strain Analysis of In-Situ Sem Mechanical Experiments

Dose-efficient strain mapping with high precision and throughput using cepstral transforms on 4D-STEM data

Investigation of Medium to High Strain Deformation Microstructures Using an Automated Electron Backscattering Pattern (EBSP) System

HAADF-STEM block-scanning strategy for local measurement of strain at the nanoscale

Diffraction-Based Multiscale Residual Strain Measurements

A review of EBSD: from rudimentary on line orientation measurements to high resolution elastic strain measurements over the past 30 years.

High precision two-dimensional strain mapping in semiconductor devices using nanobeam electron diffraction in the transmission electron microscope

A New Residual Strain Mapping Program Using Energy Dispersive X-Ray Diffraction at the Advanced Photon Source

High Precision Orientation Mapping from 4D-STEM Precession Electron Diffraction data through Quantitative Analysis of Diffracted Intensities

Elastic strain mapping of plastically deformed materials by TEM

Reconstruction of three-dimensional strain field in an asymmetrical curved core-shell hetero-nanowire

Through-Thickness Strain Scanning Using Synchrotron Radiation

Electron diffraction based techniques in scanning electron microscopy of bulk materials

Unsupervised machine learning applied to scanning precession electron diffraction data

A Multi-modal Data Merging Framework for Correlative Investigation of Strain Localization in Three Dimensions

Three-dimensional imaging of individual point defects using selective detection angles in annular dark field scanning transmission electron microscopy

Spatial mapping of focused surface acoustic waves in the investigation of high frequency strain induced changes

Nanoscale mapping of surface strain in tapered nanorods using confocal photoluminescence spectroscopy

Visualizing Three-Dimensional Micromechanical Response in Nanomaterials