Abstract:Carbon dioxide ( <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> ) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> gas sensing at 4.2 µm wavelength using an integrated silicon waveguide, featuring a sensitivity to <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications.

An Asymmetric Spoof-Fluid-Spoof Acoustic Waveguide and its Application as a CO$_2$ Sensor

Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide

Volume detection based on porous silicon waveguide for CO_2 mid-infrared spectroscopy

Planar Polymer Optical Waveguide with Metal‐Organic Framework Coating for Carbon Dioxide Sensing

Real-Time Tracking of Carbon Dioxide Concentration Using an Optical Microsphere Resonator Sensor

Integrated 3D Hydrogel Waveguide Out-Coupler by Step-and-Repeat Thermal Nanoimprint Lithography: A Promising Sensor Device for Water and pH

A Novel Photoacoustic Spectroscopy Gas Sensor Using a Low Cost Polyvinylidene Fluoride Film

Designing and experimental verification of a photoacoustic flow sensor using computational fluid dynamics

Ppb-level CO2 Detection with Miniaturized Gas Absorption Cell Based on Low-Loss Flexible Infrared Hollow Waveguide

Guided acoustic wave sensors for liquid environments

Silicon Waveguide Sensors for Carbon Dioxide Gas Sensing in the Mid-Infrared Region

A Hydrogen Sensor Based on an Acoustic Topological Material with a Coiled Structure

A Compact Fabry–Pérot Acoustic Sensor Based on Silicon Optical Waveguide Bragg Gratings

Extraordinary evanescent field confinement waveguide sensor for mid-infrared trace gas spectroscopy

Suspended whispering gallery mode resonators made of different polymers and fabricated using drop-on-demand inkjet printing for gas sensing applications

Ultrasensitive Surface Acoustic Wave Gas Sensor for Trace VOCs Detection Based on Sensing Mechanism of Gas-Liquid Phase Transition

Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy

Dual gas sensor based on anti-resonant hollow-core fiber for detection of CO2 and CH[math] with different absorption lines

Measurement of the Acoustic Relaxation Absorption Spectrum of CO2 Using a Distributed Bragg Reflector Fiber Laser

Integration of a Metal-Organic Framework Film with a Tubular Whispering-Gallery-Mode Microcavity for Effective CO<sub>2</sub> Sensing

Sensitive Carbon Monoxide Detection Based on Light Induced Thermoelastic Spectroscopy with a Hollow Waveguide and 2.3 Μm Diode Laser