Abstract:Traditional laser angular interferometers based on a Michelson Interferometer or its modifications have the same principle: changing the angle displacement to an optical path difference. However, measuring the angular error of stage travels is a dynamic process. The main trouble is lack of displacement information and need to be solved urgently. A obvious method is using two dual-frequency interferometers to get the displacement and angular. In this paper, a new kind of displacement and angle interferometer (DIAI) is introduced. In this DIAI, displacement and angular are measured simultaneously by special optical path. The DIAI consists of a stabilized orthogonal polarization dualfrequency laser, a monolithic prism and additional optical and electronic components. The dual-frequency laser is divided into reference light and measurement light by a beam-splitting prism. The measurement light spatially separated into horizontal polarized light and vertical polarized light by the polarization splitting prism. Changing by a fixed 45°tilted reflector, the vertical polarized light is parallel to the horizontal polarized light. These parallel lights reflected by two corner cube retroreflectors at a moving target. Compared with the reference light, the displacement and angular are measured. Different from the traditional method, there is only one reference corner cube retroreflector in this system. Thus, the angular measurement accuracy is better. The accuracy of the DIAI is better than ±0.25 arcsec in comparison with an autocollimator.

Low-cost Quadrature Optical Interferometer

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

A Novel And Simple Heterodyne Interferometer Scheme

Development of low-cost heterodyne interferometer with virtual electronic phasemeter

Single-Element Dual-Interferometer for Precision Inertial Sensing: Sub-picometer Structural Stability and Performance as a Reference for Laser Frequency Stabilization

Dual-frequency Laser Displacement and Angle Interferometer

Quadrature Phase Detection Based on a Laser Self-Mixing Interferometer with a Wedge for Displacement Measurement

A Reliable Millimeter-Wave Quadrature Interferometer

A single-lens universal interferometer: Towards a class of frugal optical devices

Quasi-monolithic heterodyne laser interferometer for inertial sensing

An Interferometrically Robust Opto-Mechanical Coupler to Beam Polarisation

A low cost all-digital demodulation method for fiber-optic interferometric sensors

Low-Cost High-Speed Fiber-Coupled Interferometer for Precise Surface Profilometry

Low Cost Vibrometer Utilizing Laser Diode Self-Mixing with Sound Card Controlled by LabVIEW

Mach-Zehnder Optical Interferometric Polarimeter Using Two Reference Beams with Different Heterodyne Frequency

Homodyne Laser Interferometer Involving Minimal Quadrature Phase Error to Obtain Subnanometer Nonlinearity.

Monolithically Integrated Michelson Interferometer Using an InGaAs/InAlAs Quantum Cascade Laser at λ = 4 μm

Quasi-monolithic Compact Interferometric Sensor Head Design with Laser Auto-alignment

Dual Quadrature Phasemeter for Space-Based Interferometry

Quad-Pass Homodyne Interferometer with Picometer Periodic Nonlinearity and No Beam Walk-Off

High-accuracy Self-Mixing Interferometer Based on Single High-Order Orthogonally Polarized Feedback Effects