Abstract:The macromodeling method for the nonlinear MEMS devices has become state of the art for fast component and system level simulation. A macromodel construction method is focused in this study,for a nonlinear micro-plate actuated by,a distributed electrostatic force, which is based on a. modal projection method. During the construction of the reduced order model (ROM), the energy date are calculated by several finite analysis running and, a nonlinear function fitting scheme is used, thus an analytical model of kinetic energy, strain energy and electrostatic co-energy of the system have been achieved. Then the generalized motion equations of the rectangle plate represented in the term of a set of general mode coordinates can be obtained according to the Lagrange Equation. This model order reduced method can take the effect of residual stress into account and has a low computational cost. Once the ROM of the device has been generated, it can be reused to simulate the quasistate and dynamics behaviors of the device over a `range of different electric driving waveforms. The calculated results show that the resulting ROM can capture the static/dynamic behaviors of the electrostatically actuated rectangle plate very well.

On a Free Boundary Model for Three-Dimensional MEMS with a Hinged Top Plate I: Stationary Case

On a three-dimensional free boundary problem modeling electrostatic mems

A stationary free boundary problem modeling electrostatic MEMS

A variational approach to a stationary free boundary problem modeling MEMS

On an elliptic-parabolic MEMS model with two free boundaries

Transient Pull-In Analysis of Micro-Plate with Fluid-Structure Interactions

A parabolic free boundary problem modeling electrostatic MEMS

Effects of disorder on the Raman line-shape in ZrO_2

Macromodeling Of The Electrostatically Actuated Rectangle Plate Based On Modal Projection

Stability of Rectangular Orthotropic Magnetoelectroelastic Plate

A boundary integral formulation and solution for 2D problems in magneto-electro-elastic media

The abstract quasilinear Cauchy problem for a MEMS model with two free boundaries

Heterogeneous dielectric properties in MEMS models

On a Hyperbolic Equation Arising in Electrostatic MEMS

Finite time singularity in a free boundary problem modeling MEMS

A Reduced-Order Model for Electrically Actuated Microplates

Existence and uniqueness for a coupled parabolic-hyperbolic model of MEMS

Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator

On free vibration of non-homogeneous transversely isotropic magneto-electro-elastic plates

Influence of van der Waals Forces on Electrostatically Actuated MEMS/NEMS Circular Plates

Stationary states to a free boundary transmission problem for an electrostatically actuated plate