Fabrication of Highly Ordered Nanopillar Array Electrode for High-Performance Humidity Sensors

Sung Tae Jang,Seo Jin Kim,Jueun Kim,Eun Seop Yoon,Oh Seok Kwon,Kyoung G. Lee,Bong Gill Choi
DOI: https://doi.org/10.1007/s13206-024-00150-6
IF: 4.229
2024-03-27
BioChip Journal
Abstract:Humidity sensors are used in various applications to provide suitable environmental conditions. High-performance humidity sensors require highly sensitive active sites to detect water molecules. In this study, a nanopillar-array-based electrode (NAE) was developed, which has a large specific surface area and is applicable to various humidity-sensing materials. The NAE, which was fabricated via photo-lithography and soft lithography, exhibited superior electrochemical capacitance and diffusion behavior compared to flat electrodes. The NAE-based humidity sensor exhibited a high sensitivity and linearity, low hysteresis error, and long-term stability for a duration of 25 days. Moreover, the humidity sensor maintained a consistent impedance signal in a mechanically bent state. Furthermore, the real-time monitoring performance of the humidity sensor was demonstrated by measuring humidity changes during plant transpiration.
chemistry, analytical,nanoscience & nanotechnology,biochemical research methods
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