Application of Photothermal Effect to Manufacture Ultrasonic Actuators (Abstract)
Shu-yi Zhang,Li-ping Cheng,Xiu-ji Shui,Jiong Yu,Shu-xiang Dong
DOI: https://doi.org/10.1063/1.1521498
IF: 1.6
2003-01-01
Review of Scientific Instruments
Abstract:Photothermal (PT) effect has been applied to manufacture disks [A. C. Tam, a lecture at the Institute of Acoustics, Nanjing University, People’s Republic of China (1996)] and magnetic head sliders for disk drives [A. C. Tam, C. C. Poon, and L. Crawforth, Analyt. Sci. 17, s 419 (2001)]. Now we apply the PT effect to manufacture ultrasonic motors (actuators). Recently, the ultrasonic actuators with different ultrasonic modes, such as Rayleigh (surface acoustic) mode, Lamb (plate) mode, etc., have been developed. We have designed and fabricated two rotary motors driven by surface acoustic wave (SAW) with different frequencies, but lower than 30 MHz [L. P. Cheng, G. M. Zhang, S. Y. Zhang, J. Yu, and X. J. Shui, Ultrasonics 39, 591 (2002)]. On the SAW motors (actuators), two Rayleigh wave beams were generated and propagating along the surface of a 128° YK-LiNbO3 substrate in opposite directions with each other as a stator, and a plastic disk with balls distributed along the circle of the disk was as a rotor. For miniaturizing the rotary SAW motors, and increasing the rotation velocity, the SAW frequency must be increased. Then we improve the manufacturing technology of the mechanical structure by PT effect instead of the conventional mechanical processes of the stator and rotor of the motor. A new type of rotary SAW motor (actuator) has been fabricated, in which both SAW beams with opposite propagating directions are excited by two pairs of interdigital transducers with the frequency between 30–50 MHz. In the surface of the stator (128° YX-LiNbO3 substrate), a hole with the depth about 500 μm is impinged by a focused pulsed Nd:YAG laser beam (PT effect) between two SAW propagating ways on the 128° YX-LiNbO3 substrate for fixing the axis of the motor, with the frequency between 30–50 MHz. In the bottom of the rotor (plastic disk), a lot of crown (flange) blocks with the high of 20–30 μm and the diameter of also 20–30 μm can be made by the focused pulsed Nd:YAG laser a focused continuous Ar+ laser heating (PT effect) for contacting with the stator. The symmetrical frictional force pairs produced between the crown blocks of the rotor with the local supporting SAW deformation points of the stator around the circle of the rotor to drive the motor to rotate. This kind of rotary SAW actuator can be applied to drive a recording head of HDD with satisfactory performance.