Mechanical exfoliation of non-layered metal oxides into ultrathin flakes
Ruijie Li,Zhixin Yao,Zhenjiang Li,Lei Liao,Huacong Sun,Chaonan Cong,Xudan Huang,Kang Wu,Tingjun Wang,Huifeng Tian,PeiChi Liao,Shizhuo Liu,Yihan Wang,Lina Yang Zhang,U Sasaki,Ge Yin,Junjie Guo,Yu Ye,Xiaoding Wei,Xueyun Wang,Jiawang Hong,Jinhai Mao,Lihong Bao,Lifen Wang,Xuedong Bai,Peng Gao,Kaihui Liu,Lei Liao,Jun He,Shulin Bai,Yanfeng Zhang,Yanglong Hou,Ruqiang Zou,Hong-Jun Gao,Yue Zhang,Enge Wang,Lei Liu
DOI: https://doi.org/10.1038/s44160-024-00657-8
2024-10-03
Nature Synthesis
Abstract:The exfoliation of layered crystals can produce diverse two-dimensional (2D) materials and heterostructures. However, the micromechanical cleavage of non-stratified materials into 2D flakes remains challenging due to z -direction consecutive bonding. Here we report a mechanical exfoliation method for producing freestanding 2D metal oxide flakes. By synchronizing the thermal decomposition of metal salts and water-assisted forming, we synthesize large-aspect-ratio lamellae of amorphous and crystalline metal oxides as parent materials, which can exfoliate to ultrathin flakes. The freestanding, transferrable features allow the room temperature integration of high- k metal oxide flakes as top-gate dielectrics in 2D material transistors. We utilize the dual-function Cr-doped AlO x flake as the gating dielectric and component, sensing and storing the visible light by photon-programming floating gate effect, showing an in-sensor computing device. Our results provide a platform to investigate the fundamental properties of ultrathin metal oxides free of substrate clamping and pave the way to metal oxides-based functional devices.