Stress-strain in electron-beam activated polymeric micro-actuators

Davide Giambastiani,Fabio Dispinzeri,Francesco Colangelo,Stiven Forti,Camilla Coletti,Alessandro Tredicucci,Alessandro Pitanti,Stefano Roddaro
DOI: https://doi.org/10.1063/5.0021812
2020-07-05
Abstract:Actuation of thin polymeric films via electron irradiation is a promising avenue to realize devices based on strain engineered two dimensional (2D) materials. Complex strain profiles demand a deep understanding of the mechanics of the polymeric layer under electron irradiation; in this article we report a detailed investigation on electron-induced stress on poly-methyl-methacrylate (PMMA) thin film material. After an assessment of stress values using a method based on dielectric cantilevers, we directly investigate the lateral shrinkage of PMMA patterns on epitaxial graphene, which reveals a universal behavior, independent of the electron acceleration energy. By knowing the stress-strain curve, we finally estimate an effective Young's modulus of PMMA on top of graphene which is a relevant parameter for PMMA based electron-beam lithography and strain engineering applications.
Mesoscale and Nanoscale Physics,Applied Physics
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