Abstract:The diffraction efficiencies of a Fresnel zone plate (ZP), fabricated by Xradia Inc. using the electron-beam writing technique, were measured using polarized, monochromatic synchrotron radiation in the extreme ultraviolet wavelength range 3.4-22 nm. The ZP had 2 mm diameter, 3330 zones, 150 run outer zone width, and a 1 mm central occulter. The ZP was supported by a 100 rim thick Si3N4 membrane. The diffraction patterns were recorded by CMOS imagers with phosphor coatings and with 5.2 mu m or 48 mu m pixels. The focused +n orders (n=1-4), the diverging -1 order, and the undiffracted 0 order were observed as functions of wavelength and off-axis tilt angle. Sub-pixel focusing of the +n orders was achieved. The measured efficiency in the +1 order was in the 5% to 30% range with the phase-shift enhanced efficiency occurring at 8.3 nm where the gold bars are partially transmitting. The +2 and higher order efficiencies were much lower than the +1 order efficiency. The efficiencies were constant when the zone plate was tilted by angles up to +/- 1 degrees from the incident radiation beam. This work indicates the feasibility and benefits of using zone plates to measure the absolute EUV spectral emissions from solar and laboratory sources: relatively high EUV efficiency in the focused +1 order, good out-of-band rejection resulting from the low higher-order efficiencies and the ZP focusing properties, insensitivity to (unfocused) visible light scattered by the ZP, flat response with off-axis angle, and insensitivity to the polarization of the radiation based on the ZP circular symmetry. EUV sensors with Fresnel zone plates potentially have many advantages over existing sensors intended to accurately measure absolute EUV emission levels, such as those implemented on the GOES N-P satellites that use transmission gratings which have off-axis sensitivity variations and poor out-of-band EUV and visible light rejection, and other solar and laboratory sensors using reflection gratings which are subject to response variations caused by surface contamination and oxidation.

Optical characterisation of micro-fabricated Fresnel zone plates for atomic waveguides

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Ion beam lithography for Fresnel zone plates in X-ray microscopy

X-ray Imaging Fresnel Zone Plates and Fabrication

Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Imaging and focusing of atoms by a fresnel zone plate

Experimental study on subwavelength focusing optical field detection methods for micro-Fresnel zone plate

Experimental Verification of the Super-Resolution Focusing Optical Needle and Imaging with a New Type Fresnel Zone Plate

Characterization of suspended membrane waveguides towards a photonic atom trap integrated platform

Validation of Vectorial Theories for the Focusing of High Numerical Aperture Fresnel Zone Plates

Modulation of a super-Gaussian optical needle with high-NA Fresnel zone plate.

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Axial Intensity Distribution of a Micro-Fresnel Zone Plate at an Arbitrary Numerical Aperture

High efficiency and scalable fabrication of fresnel zone plates using holographic femtosecond pulses

Fizeau Interferometer with Binary Phase Fresnel-zone Plate Reference for Precision Measurement of Large Convex Lens

A Sub-5mW Evanescent Field Atom Guide with Nanofibers towards Guided Atom Interferometry with Membrane Waveguides

Electrically controlled focusing of de Broglie matter waves by Fresnel zone plate

Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

Chromatic Confocal Measurement Method Using a Phase Fresnel Zone Plate.

Measurement of Zone Plate Efficiencies in the Extreme Ultraviolet and Applications to Radiation Monitors for Absolute Spectral Emission

Focusing Properties of Fractal Zone Plates with Variable Lacunarity: Experimental Studies Based on Liquid Crystal on Silicon