Mixed Dimensional ZnO/WSe 2 Piezo-gated Transistor with Active Millinewton Force Sensing

Yulin Geng,Jing Xu,Muhammad Ammar Bin Che Mahzan,Peter Lomax,Muhammad Mubasher Saleem,Enrico Mastropaolo,Rebecca Cheung
DOI: https://doi.org/10.1021/acsami.2c15730
2022-10-20
Abstract:This work demonstrates a mixed-dimensional piezoelectric-gated transistor in the microscale that could be used as a millinewton force sensor. The force-sensing transistor consists of 1D piezoelectric zinc oxide (ZnO) nanorods (NRs) as the gate control and multilayer tungsten diselenide (WSe(2)) as the transistor channel. The applied mechanical force on piezoelectric NRs can induce a drain-source current change (ΔI(ds)) on the WSe(2) channel. The different doping types of the WSe(2) channel have...
materials science, multidisciplinary,nanoscience & nanotechnology
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