Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects
Fırat Anğay,Lukas Löfler,Florent Tetard,Dominique Eyidi,Philippe Djemia,David Holec,Gregory Abadias
DOI: https://doi.org/10.1116/6.0000292
2020-09-01
Abstract:In this work, the structural and mechanical properties of ternary Mo-Al-N alloys are investigated by combining thin film growth experiments and density functional theory (DFT) calculations. Mo<sub>1−x</sub>Al<sub>x</sub>N<sub>y</sub> thin films (∼300 nm thick), with various Al fractions ranging from x = 0 to 0.5 and nitrogen-to-metal (Al + Mo) ratio ranging from y = 0.78 to 1.38, were deposited by direct-current reactive magnetron cosputtering technique from elemental Mo and Al targets under Ar + N<sub>2</sub> plasma discharges. The Al content was varied by changing the respective Mo and Al target powers, at a fixed N<sub>2</sub> (20 SCCM) and Ar (25 SCCM) flow rate, and using two different substrate temperatures <i>T</i><sub>s </sub>= 350 and 500 °C. The elemental composition, mass density, crystal structure, residual stress state, and intrinsic (growth) stress were examined by wavelength dispersive x-ray spectroscopy, x-ray reflectivity, x-ray diffraction, including pole figure and <span class="equationTd inline-formula"><math> si n 2 ψ</math></span> measurements, and real-time <i>in situ</i> wafer curvature. Nanoindentation tests were carried out to determine film hardness <i>H</i> and elastic modulus <i>E</i><sub>IT</sub>, while the shear elastic constant C<sub>44</sub> was measured selectively by surface Brillouin light spectroscopy. All deposited Mo<sub>1−x</sub>Al<sub>x</sub>N<sub>y</sub> films have a cubic rock-salt crystal structure and exhibit a fiber-texture with a [001] preferred orientation. The incorporation of Al is accompanied by a rise in nitrogen content from 44 to 58 at. %, resulting in a significant increase (2%) in the lattice parameter when x increases from 0 to 0.27. This trend is opposite to what DFT calculations predict for cubic defect-free stoichiometric Mo<sub>1−x</sub>Al<sub>x</sub>N compounds and is attributed to variation in point defect concentration (nitrogen and metal vacancies) when Al substitutes for Mo. Increasing <i>T</i><sub>s</sub> from 350 to 500 °C has a minimal effect on the structural properties and phase composition of the ternary alloys but concurs to an appreciable reduction of the compressive stress from −5 to −4 GPa. A continuous increase and decrease in transverse sound velocity and mass density, respectively, lead to a moderate stiffening of the shear elastic constant from 130 to 144 GPa with increasing Al fraction up to x = 0.50, and a complex and nonmonotonous variation of <i>H</i> and <i>E</i><sub>IT</sub> is observed. The maximum hardness of ∼33 GPa is found for the Mo<sub>0.81</sub>Al<sub>0.19</sub>N<sub>1.13</sub> film, with nitrogen content close to the stoichiometric composition. The experimental findings are explained based on structural and elastic constant values computed from DFT for defect-free and metal- or nitrogen-deficient rock-salt MoAlN compounds.