Abstract:In the past decade, lithium niobate (LiNbO3 or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities and low loss, has been extensively investigated. Despite numerous demonstrations of high-performance LN photonics, processing lithium niobate remains challenging and suffers from incompatibilities with standard complementary metal-oxide semiconductor (CMOS) fabrication lines, limiting its scalability. Silicon carbide (SiC) is an emerging material platform with a high refractive index, a large non-linear Kerr coefficient, and a promising candidate for heterogeneous integration with LN photonics. Current approaches of SiC/LN integration require transfer-bonding techniques, which are time-consuming, expensive, and lack precision in layer thickness. Here we show that amorphous silicon carbide (a-SiC), deposited using inductively coupled plasma enhanced chemical vapor deposition (ICPCVD) at low temperatures (< 165 C), can be conveniently integrated with LiNbO3 and processed to form high-performance photonics. Most importantly, the fabrication only involves a standard, silicon-compatible, reactive ion etching step and leaves the LiNbO3 intact, hence its compatibility with standard foundry processes. As a proof-of-principle, we fabricated waveguides and ring resonators on the developed a-SiC/LN platform and achieved intrinsic quality factors higher than 106,000 and resonance electro-optic tunability of 3.4 pm/V with 3 mm tuning length. We showcase the possibility of dense integration by fabricating and testing ring resonators with 40um radius without a noticeable loss penalty. Our platform offers a CMOS-compatible and scalable approach for implementation of future fast electro-optic modulators and reconfigurable photonic circuits as well as nonlinear processes which can benefit from involving both second and third-order nonlinearities.

Photonic crystal structures in ion-sliced lithium niobate thin films

Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals

Lithium niobate on insulator: an emerging nanophotonic crystal for optimized light control

Nanostructuring lithium niobate substrates by focused ion beam milling

Photonic crystal fabrication in lithium niobate via pattern transfer through wet and dry etched chromium mask

Polarization sensitive microstructures fabricated on lithium niobate surfaces by using femtosecond laser pulses

High density lithium niobate photonic integrated circuits

Laser polarization dependence of strong-field ionization in lithium niobate

Molecular Beam Epitaxy Growth of High Crystalline Quality LiNbO$_{3}$

Raman characterization of focused ion beam fabricated lithium niobate film

Axial birefringence induced focus splitting in lithium niobate

LiNbO3 Crystals: from Bulk to Film

Tightly confining lithium niobate photonic integrated circuits and lasers

Ultra-compact Electro-Optic Modulator Based on Etchless Lithium Niobate Photonic Crystal Nanobeam Cavity.

Design of nanobeam photonic crystal resonators for a silicon-on-lithium-niobate platform

Mg-Ion Indiffusion of Lithium-Niobate Single-Crystal Fiber

High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Realization of lithium niobate single crystal fiber cladding and its optical characteristics

Femtosecond-laser-assisted high-aspect-ratio nanolithography in lithium niobate

Heterogeneous integration of amorphous silicon carbide on thin film lithium niobate

Advancements in Ultrafast-Laser-Inducing Micro-Nanophotonic Structures Inside Lithium Niobate(Invited)