Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

Suspended Spot-Size Converters for Scalable Single-Photon Devices

Curved GaAs cantilever waveguides for the vertical coupling to photonic integrated circuits

High efficiency grating couplers for strain tunable GaAs quantum dot based entangled photon sources

Efficient optical coupling to gallium arsenide nano-waveguides and resonators with etched conical fibers

Coupling Nanowire Quantum Dots to Optical Waveguides by Microsphere-Induced Photonic Nanojet

Efficient demultiplexed single-photon source with a quantum dot coupled to a nanophotonic waveguide

Efficient fiber-coupled single-photon source based on quantum dots in a photonic-crystal waveguide

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

A fiber-integrated nanobeam single photon source emitting at telecom wavelengths

Collecting single photons from a cavity-coupled quantum dot using an adiabatic tapered fiber

Efficient and low-noise single-photon-level frequency conversion interfaces using silicon nanophotonics

A fiber-integrated single photon source emitting at telecom wavelengths

Hybrid Integration of Solid-State Quantum Emitters on a Silicon Photonic Chip

Electro-optic routing of photons from single quantum dots in photonic integrated circuits

Scalable in operando strain tuning in nanophotonic waveguides enabling three-quantum-dot superradiance

Single quantum dot selection and tailor-made photonic device integration using nanoscale focus pinspot

Combined metallic nano-rings and solid-immersion lenses for bright emission from single InAs/GaAs quantum dots

Compact Chirped Fiber Bragg Gratings for Single-Photon Generation from Quantum Dots

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

Modal Coupling of Single Photon Emitters Within Nanofiber Waveguides

Indistinguishable photons from deterministically integrated single quantum dots in heterogeneous GaAs/Si$_3$N$_4$ quantum photonic circuits