Abstract:We directly correlate the local (20-nm scale) and global electronic properties of a device containing mono-, bi- and tri-layer epitaxial graphene (EG) domains on 6H-SiC(0001) by simultaneously performing local surface potential measurements using Kelvin probe force microscopy and global transport measurements. Using well-controlled environmental conditions, where the starting state of the surface can be reproducibly defined, we investigate the doping effects of N2, O2, water vapour and NO2 at concentrations representative of the ambient air. We show that presence of O2, water vapour and NO2 leads to p-doping of all EG domains. However, the thicker layers of EG are significantly less affected by the atmospheric dopants. Furthermore, we demonstrate that the general consensus of O2 and water vapour present in ambient air providing majority of the p-doping to graphene is a common misconception. We experimentally show that even the combined effect of O2, water vapour, and NO2 at concentrations higher than typically present in the atmosphere does not fully replicate the state of the EG surface in ambient air. All doping effects can be reproducibly reversed by vacuum annealing. Thus, for EG gas sensors it is essential to consider naturally occurring environmental effects and properly separate them from those coming from targeted species.

What problem does this paper attempt to address?

### What problems does this paper attempt to solve? This paper aims to study the influence of environmental conditions (such as the presence of gases like nitrogen, oxygen, water vapor, and nitrogen dioxide) on the electronic properties of multilayer epitaxial graphene (EG), and directly correlate local (20 - nanometer scale) and global electrical characteristics. Specifically, the authors hope to reveal the following through experiments: 1. **Doping effects of different gases on EG**: - The doping effects of N₂, O₂, water vapor, and NO₂ on epitaxial graphene at typical atmospheric concentrations were studied. - Special attention was paid to how these gases change the electronic properties of single - layer, double - layer, and triple - layer EG. 2. **The influence of environmental conditions on the surface potential and transport properties of EG**: - The local surface potential was measured using Kelvin probe force microscopy (KPFM), and combined with global transport measurements to characterize the electronic properties of EG. - The changes in the surface properties of EG after vacuum annealing treatment and their reversibility were explored. 3. **Distinguishing the influence of environmental factors and target species on the EG sensor response**: - For the application of EG gas sensors, it is necessary to clearly distinguish the sensing response from environmental air and the response from target gases. - It was verified whether the commonly - seen O₂ and water vapor in the environment are the main p - type doping sources, and the results show that this view is a misunderstanding. 4. **Exploring the differences in environmental sensitivity of EG with different numbers of layers**: - It was found that thicker EG layers (such as double - layer and triple - layer) are less affected by environmental doping, while single - layer EG is more sensitive to environmental changes. - This finding is of great significance for understanding the behavior of EG in different applications. 5. **Verifying the reversibility of environmental doping**: - Experiments show that the environmental doping effect can be reversibly eliminated by vacuum annealing, which is very important for the reliability and re - use of EG devices. In conclusion, through systematic research, this paper reveals the specific influence of environmental factors on the electronic properties of epitaxial graphene, and provides important experimental basis and technical guidance for the development of high - performance EG - based gas sensors.

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