Abstract:The detection of multiple traces is of paramount importance for facilitating chemical production, safeguarding public safety and health, and advancing scientific research, among other critical applications. Currently, a single trace can be accurately identified by MEMS resonant sensors, but quantitative detection of multiple traces still faces significant challenges, especially the increment of hardware and signal processing requirements due to multichannel output signal and complex resonator structure. Therefore, a single-input and single-output (SISO) sensing scheme for multiple traces is thus proposed in this work via high-order nonlinear mode localization. A coupled trio-cantilever array resonator actuated by nonlinear electrostatic force is designed for three traces detection. One side cantilever (No. 1) is actuated by the electrostatic electrode around the 4th to 6th modal frequencies of the resonator, and square and cubic nonlinearities are also imported to break the structural symmetry. The vibration energy of Cantilever No. 1 will transfer to No. 2 and No. 3 via the overhangs. By measuring the resonant frequency shifts of the 4th to 6th localized modes in No. 3 and decoupling the relationship between the resonant frequency shifts and the masses of the three traces introduced onto the surface of each cantilever, SISO identification and detection of the three traces can be realized. After multiple simulations and experimental validations, both theoretical and experimental results consistently demonstrate that this scheme achieves high sensitivity, high resolution, and SISO detection. Most of all, by theoretically decoupling the intricate relationship between the resonant frequency shifts and the three traces, the maximum relative sensing errors for the three traces are greatly reduced. The experimental results show that the maximum relative errors of the three cantilevers for measuring trace mass are = 13.11%, = 6.42%, and = 7.07%. This effort expands the theoretical framework of mode localization, providing a foundation for a novel quantitative approach to the detection of multiple traces.

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