Abstract:Micromechanical oscillator sustains oscillation through a velocity-proportional feedback force. Stabilization of the oscillation frequency is typically achieved by increasing the amplitude of the resonator while remaining in its linear regime. However, nonlinear effects and parasitic cross-talk unavoidably emerge with the reduction of oscillator size, severely limiting its performance. To overcome these limitations, in this paper, a novel and robust frequency stabilization scheme that employs the interaction of intrinsic high-order nonlinearities in a parametrically driven arch beam resonator is proposed and verified. Firstly, a micromechanical resonator with intrinsic high-order nonlinearities is specifically designed. Upon parametrically driving the resonator into resonance at large vibrational amplitudes, the bending of the resonance curve changes direction. This mixed behavior forms a pseudo-linear region without the need for auxiliary electrostatic tuning, simplifying the circuits and enhancing the robustness of the system. Secondly, significant frequency stability enhancement is observed when driving the resonator into self-sustained parametric oscillation in the pseudo-linear regime where output frequency decouples from the amplitude noise. Besides, the phase noise suppression effect of the parametrically driven oscillator is experimentally demonstrated when compared with the conventional directly driven oscillator. Finally, a theoretical phase noise model is developed, which well reproduces the observed frequency stabilization in the pseudo-linear regime and phase noise suppression effect of parametric oscillations.

Dual frequency parametric excitation of a nonlinear multi degree of freedom amplifier with a digitally modified topology

Dual frequency parametric excitation of a nonlinear, multi degree of freedom mechanical amplifier with electronically modified topology

The effects of nonlinear damping on degenerate parametric amplification

Amplitude-modulated Resonant Accelerometer Employing Parametric Pump

Amplitude Deflection in a Nonlinear MEMS Resonator under Parametric Excitation

Space-time symmetry and nonreciprocal parametric resonance in mechanical systems

Nonlinearity-mediated digitization and amplification in electromechanical phonon-cavity systems

Frequency Stabilization in a Pseudo-Linear Micromechanical Parametric Oscillator

Optimization of a Compliant Mechanical Amplifier Based on a Symmetric Five-Bar Topology

Nonlinear Dynamics and Parameter Identification of Electrostatically Coupled Resonators

Mechanical Nonlinearity Elimination with a Micromechanical Clamped-Free Semicircular Beams Resonator

Parametric resonance of multi-frequency excited MEMS based on homotopy analysis method

Coupling Capacitively Distinct Mechanical Resonators for Room-Temperature Phonon-Cavity Electromechanics.

Dynamics of nonlinear coupled electrostatic micromechanical resonators under two-frequency parametric and external excitations

Cavity electromechanics with parametric mechanical driving

Enhanced interaction between a mechanical oscillator and two coupled resonant electrical circuits

Dynamical strong coupling and parametric amplification in mechanical modes of graphene drums

Weak signal enhancement by non-linear resonance control in a forced nano-electromechanical resonator

Weak signal enhancement by nonlinear resonance control in a forced nano-electromechanical resonator

Parametric amplification and self-oscillation in a nanotube mechanical resonator.

Tunable Mechanical-Mode Coupling Based on Nanobeam-Double Optomechanical Cavities