A streamlined approach to particle ALD coating of spherical beads

Ryan P Badman,Xinwei Wu,Vincent J Genova

DOI: https://doi.org/10.48550/arXiv.1611.07855

2016-11-24

Abstract:Conformal Atomic Layer Deposition (ALD) of nanoparticles is an now an established nanofabrication concept employed by many researchers for applications such as creating diffusion barriers, tuning catalysis, or masking a toxic particle core with a biocompatible shell. To conformally coat many grams of nanoparticles with ALD, long precursor soaking steps, fluidized beds, vibrating stages, or rotary feedthroughs are typically needed. While these impressive advancements in ALD techniques dominate literature searches of particle ALD coating, such methods may lead to a more time-intensive or cost-prohibitive process than what is required by many typical academic researchers. Thus we have performed this study to explore the limits of static planar ALD particle coating, the simplest method to coat nanoparticles with an ALD film. Using an Arradiance GEMStar6 ALD system, we have explored a fast and simple static ALD particle coating process. Our protocol produces relatively small, but still academically useful, quantities of uniformally ALD-coated nanospheres. This process can be scaled up to nanoparticle samples in the tens of milligram to gram range. We have demonstrated that we can achieve silica or titania spherical particle synthesis, and then uniform ALD coating on the nanoparticles, all within 8-10 hours. The diameter of the chemically synthesized silica and titania nanoparticles is tunable from 50 nm up to greater than a micron. The refractive index of the titania nanoparticles is tunable from approximately 1.7 to 2.7. This report will be most useful for researchers who are new to particle ALD, or who want to experiment with core particles conformally covered with ALD shells before moving to a more complicated, higher throughput ALD method. We provide details for particle synthesis, storage, and ALD coating along with a comparison to more conventional approaches.

Materials Science

What problem does this paper attempt to address?

The problem that this paper attempts to solve is how to perform atomic layer deposition (ALD) coating on nanoparticles (such as titanium dioxide and silicon dioxide nanospheres) efficiently and at low cost to achieve high - precision nano - scale coating. Specifically, the author proposes a simplified method to deposit aluminum oxide, titanium dioxide and platinum thin films on spherical nanoparticles without the need for long - term immersion or complex equipment (such as fluidized beds, vibration or multi - component rotating platforms). This method significantly shortens the deposition time and can be easily implemented in academic research laboratories.

### Main problem summary:
1. **Improve the efficiency of ALD coating**: The traditional ALD process requires a long - term precursor immersion step, resulting in a long deposition process. This paper proposes a simplified method, which reduces the deposition time of a 45 - nm aluminum oxide coating from 48 hours to 8 hours.
2. **Reduce cost and complexity**: By simplifying the process flow and avoiding the use of expensive fluidized beds or complex rotating devices, ALD coating can be carried out in an ordinary laboratory environment, reducing equipment and operation costs.
3. **Maintain high - quality coating**: Although the process is simplified, it can still ensure the quality and uniformity of the coating, with no significant difference compared to traditional methods.
4. **Applicable to multiple materials**: This method is not only applicable to titanium dioxide nanospheres, but also can be applied to silicon dioxide nanospheres, and can deposit different types of thin films (such as aluminum oxide, titanium dioxide and platinum).

### Key innovation points:
- **Simplify the ALD process**: Reduce the precursor immersion time and optimize the deposition parameters to make the deposition process more efficient.
- **Wide range of applicability**: Applicable to different types of nanoparticles and multiple coating materials.
- **Low - cost and easy to operate**: Suitable for application in academic research laboratories without the need for complex equipment.

Through these improvements, this method provides a fast, economical and efficient solution for the functionalization of nanoparticles, especially for application fields that require high - precision coatings, such as biomedicine, optical devices and catalytic materials.