Abstract:Direct-write multi-photon laser lithography (MPL) combines highest resolution on the nanoscale with essentially unlimited 3D design freedom. Over the previous years, the groundbreaking potential of this technique has been demonstrated in various application fields, including micromechanics, material sciences, microfluidics, life sciences as well as photonics, where in-situ printed optical coupling elements offer new perspectives for package-level system integration. However, millimeter-wave (mmW) and terahertz (THz) devices could not yet leverage the unique strengths of MPL, even though the underlying devices and structures could also greatly benefit from 3D freeform microfabrication. One of the key challenges in this context is the fact that functional mmW and THz structures require materials with high electrical conductivity and low dielectric losses, which are not amenable to structuring by multi-photon polymerization. In this work, we introduce and experimentally demonstrate a novel approach that allows to leverage MPL for fabricating high-performance mmW and THz structures with hitherto unachieved functionalities. Our concept exploits in-situ printed polymer templates that are selectively coated through highly directive metal deposition techniques in combination with precisely aligned 3D-printed shadowing structures. The resulting metal-coated freeform structures offer high surface quality in combination with low dielectric losses and conductivities comparable to bulk material values, while lending themselves to fabrication on planar mmW/THz circuits. We experimentally show the viability of our concept by demonstrating a series of functional THz structures such as THz interconnects, probe tips, and suspended antennas. We believe that our approach offers disruptive potential in the field of mmW and THz technology and may unlock an entirely new realm of laser-based 3D manufacturing.

Analysis of 3D-printed metal for rapid-prototyped reflective terahertz optics

Terahertz refractive index control of 3D printing materials by UV exposure

Broadband and Multiband Terahertz Metamaterials Based on 3-D-Printed Liquid Metal-Filled Microchannel

3D-Printed Terahertz Metamaterial for Electromagnetically Induced Reflection Analogue

3D-printed all-metal terahertz multibeam lens antenna based on photonic crystal

Three-Dimensional Printed Ultrabroadband Terahertz Metamaterial Absorbers

Terahertz Response of Microfluidic-Jetted Three-Dimensional Flexible Metamaterials

3D-printed terahertz metamaterial absorber based on vertical split-ring resonator

Investigation of geometry-dependent field properties of 3D printed metallic photonic crystals

Low-cost Discrete Dielectric Terahertz Lens Antenna Using 3D Printing

3D Conductive Polymer Printed Metasurface Antenna for Fresnel Focusing

High Power Dielectric Reflectarray Antenna using 3D Printing Technology

Terahertz reconfigurable multi-functional metamaterials based on 3D printed mortise-tenon structures

Bio-inspired Terahertz Metamaterials Based on Hybrid Additive Manufacturing

3D Printed Reflectarray Antenna at 60 Ghz

Broadband Terahertz Metalenses Based on Printed Circuit Board Fabrication (Advanced Optical Materials 11/2024)

Toward 3D Printing of Pure Metals by Laser-Induced Forward Transfer.

Terahertz Rare-Earth Orthoferrite Metamaterials by 3-D Direct Writing Technology

Freeform terahertz structures fabricated by multi-photon lithography and metal coating

Metal 3D nanoprinting with coupled fields