Abstract:High/ultra-precision motion measurements for precision translation stages are highly desired in modern manufacturing systems and instruments. In this work, we introduce a wide range three-axis grating encoder with nanometric resolution, which can measure the x-, y- and z-axial translational motions of a stage simultaneously. The grating encoder is composed of a reflective-type planar scale grating with a period of 8 μm and an optical reading head. A planar reference grating, which is the same as the planar scale grating except the length and width, is employed in the optical reading head. The x- and y- directional ±1st order diffractive beams of the planar scale grating interfere with the corresponding diffractive beams of the planar reference grating, forming the measurement signals. The x- and y- directional ±1st order diffractive beams of the two planar gratings propagate against their original incident path, working as the autocollimatic diffractive beams. Therefore, the z-axial measurement range of the proposed grating encoder is greatly enhanced. The x- and y- axial measurement ranges depend on the size of the planar scale grating. To make the grating encoder more compact, a double grating beam-splitting (DGBS) unit and two diffractive optical elements (DOEs) are introduced. The experimental results indicate that the z-axial displacement resolution is as high as 4 nm with an electronic data division card of 80 segments developed by our lab.

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