Abstract:Optomechanical crystals are combinations of photonic and phononic crystals, which simultaneously control optical and acoustic waves with nanoscale periodic structure and form optomechanical systems with high mechanical frequency and lager photon-phonon interaction. We proposed a nanobeam cavity based on hetero optomechanical crystal with two types of periodic structures, where the optical and mechanical modes separately confined by two periodic structures. A mechanical frequency as high as 5.66 GHz was achieved while the working wavelength of the optical cavity was maintained at 1.55 μm. Besides, due to the flexibility introduced by the hetero structure, the optical field and the strain field were designed to be concentrated inside the optomechanical cavities and resemble each other with an enhanced overlap. As a result, the optomechanical coupling rate, which represents the interaction strength between photon and phonon, was as high as 1.31 MHz. Also we proposed and optimized an optomechanical crystal nanobeam cavity, only by increasing the radius of air holes in the defect region, for small effective mass. A very small effective mass of 85 fg was estimated. By far, the on-chip cavity optomechanical systems has to be with the help of tapered fibers or one-sided waveguide with circulator to couple the light into or out. Here we demonstrated larger center-hole nanobeam structures with on-chip transmission waveguide coupling. The mechanical frequency was measured up to 4.47 GHz, with a high mechanical Q-factor of 1.4 × 103 in ambient environment. The corresponding optomechanical coupling rate and the effective mass were estimated to be 836 kHz and 136 fg, respectively. With transmission waveguide coupled structure and small footprint of only 3.4 μm2, this simple cavity can be directly used as functional components and integrated with other on-chip devices in future practical applications.

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