Abstract:The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices, including low-voltage, high-speed modulators, electro-optic frequency combs, and microwave-optical transducers. Yet to date, LiNbO3 photonic integrated circuits (PICs) have mostly been fabricated using non-standard etching techniques that lack the reproducibility routinely achieved in silicon photonics. Widespread future application of thin-film LiNbO3 requires a reliable and scalable solution using standard processing and precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO3 photonic platform that overcomes the abovementioned challenges by employing wafer-scale bonding of thin-film LiNbO3 to planarized low-loss silicon nitride (Si3N4) photonic integrated circuits, a mature foundry-grade integrated photonic platform. The resulting devices combine the substantial Pockels effect of LiNbO3 with the scalability, high-yield, and complexity of the underlying Si3N4 PICs. Importantly, the platform maintains the low propagation loss (<0.1 dB/cm) and efficient fiber-to-chip coupling (<2.5 dB per facet) of the Si3N4 waveguides. We find that ten transitions between a mode confined in the Si3N4 PIC and the hybrid LiNbO$_3$ mode produce less than 0.8 dB additional loss, corresponding to a loss per transition not exceeding 0.1 dB. These nearly lossless adiabatic transitions thus link the low-loss passive Si3N4 photonic structures with electro-optic components. We demonstrate high-Q microresonators, optical splitters, electrically tunable photonic dimers, electro-optic frequency combs, and carrier-envelope phase detection of a femtosecond laser on the same platform, thus providing a reliable and foundry-ready solution to low-loss and complex LiNbO3 integrated photonic circuits.

Efficient Poling‐Free Wavelength Conversion in Thin Film Lithium Niobate Harnessing Bound States in the Continuum

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Second Harmonic Generation in Apodized Chirped Periodically Poled Lithium Niobate Loaded Waveguides Based on Bound States in Continuum

Adapted poling to break the nonlinear efficiency limit in nanophotonic lithium niobate waveguides

Efficient second harmonic generation by harnessing bound states in the continuum in semi-nonlinear etchless lithium niobate waveguides

Efficient second-harmonic generation of quasi-bound states in the continuum in lithium niobate thin film enhanced by Bloch surface waves

Optimizing the Efficiency of a Periodically Poled LNOI Waveguide Using in Situ Monitoring of the Ferroelectric Domains

Thin Film Wavelength Converters for Photonic Integrated Circuits

Second-harmonic generation in periodically-poled thin film lithium niobate wafer-bonded on silicon

Efficient Second Harmonic Generation in Silicon Covered Lithium Niobate Waveguides

Ultra-broadband and Low-Loss Edge Coupler for Highly Efficient Second Harmonic Generation in Thin-Film Lithium Niobate

Highly efficient polarization-entangled photon-pair generation in lithium niobate waveguides based on bound states in the continuum

Resonant Nonlinear Nanostructured Grating in an Unstructured Lithium Niobate on Insulator Platform

Wafer-Scale Periodic Poling of Thin-Film Lithium Niobate

A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

Second-harmonic generation with a 440,000% W-1 conversion efficiency in a lithium niobate microcavity without periodic poling

Efficient Second Harmonic Generation in a Reverse‐Polarization Dual‐Layer Crystalline Thin Film Nanophotonic Waveguide

Heterogeneous Integration of Lithium Niobate and Silicon Nitride Waveguides for Wafer-Scale Photonic Integrated Circuits on Silicon.