Abstract:Photonic integrated circuits are indispensible for data transmission within modern datacenters and pervade into multiple application spheres traditionally limited for bulk optics, such as LiDAR and biosensing. Of particular interest are ferroelectrics such as Lithium Niobate, which exhibit a large electro-optical Pockels effect enabling ultrafast and efficient modulation, but are difficult to process via dry etching . For this reason, etching tightly confining waveguides - routinely achieved in silicon or silicon nitride - has not been possible. Diamond-like carbon (DLC) was discovered in the 1950s and is a material that exhibits an amorphous phase, excellent hardness, and the ability to be deposited in nano-metric thin films. It has excellent thermal, mechanical, and electrical properties, making it an ideal protective coating. Here we demonstrate that DLC is also a superior material for the manufacturing of next-generation photonic integrated circuits based on ferroelectrics, specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss photonic integrated circuits with losses as low as 5.6 dB/m. In contrast to widely employed ridge waveguides, this approach benefits from a more than 1 order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a frequency agile hybrid integrated III-V Lithium Niobate based laser with kHz linewidth and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and CMOS-compatible driving voltage. Our approach can herald a new generation of tightly confining ferroelectric photonic integrated circuits.

Nanofabrication of Lithium Niobate Anti‐Reflective Subwavelength Structures for High Power Mid‐Infrared Lasers

Ordered 3D ThinShell Nanolattice Materials with NearUnity Refractive Indices

Femtosecond-laser-assisted high-aspect-ratio nanolithography in lithium niobate

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Growth of large size near-stoichiometric lithium niobate single crystals with low coercive field for manufacturing high quality periodically poled lithium niobate

Good-Quality and High-Efficiency Dicing for Thick LiNbO3 Wafers Using Picosecond Laser Pulses

Femtosecond laser writing of lithium niobate ferroelectric nanodomains

Fabrication of Lithium Niobate Fork Grating by Laser-Writing-induced Selective Chemical Etching

Ultra-smooth processing of lithium niobate for outstanding mid-infrared transmittance

Advanced Etching Techniques of LiNbO3 Nanodevices

Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Fabrication of 100-Nm-period Domain Structure in Lithium Niobate on Insulator

Tightly confining lithium niobate photonic integrated circuits and lasers

Three-dimensional Numerical Simulation on the Directly Written Waveguide Formation with 320 Nm UV Laser in Lithium Niobate

In-situ Poling of Lithium Niobate Films on Silicon Wafer by Applying a Low Electric Field During Pulsed Laser Deposition

Tunable Mid-Infrared Dispersive Wave Generation of High-Efficiency and Broadband in a Suspended Thin-Film Lithium-Niobate-on-Insulator Waveguide

Arbitrary fabrication of complex lithium niobate three-dimensional microstructures for second harmonic generation enhancement

High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Laser polarization dependence of strong-field ionization in lithium niobate

Low-loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-length and a Sub-nanometer Surface Roughness