A Miniatured Passive Low-Pass Filter With Ultrawide Stopband Based on 3-D Integration Technology

Xiangkun Yin,Fengjuan Wang,Qijun Lu,Xiaoxian Liu,Yang Liu,Yintang Yang

DOI: https://doi.org/10.1109/lmwc.2021.3115607

IF: 3

2022-01-01

IEEE Microwave and Wireless Components Letters

Abstract:By using integrated lumped elements based on through-silicon via (TSV) technology, a 3-D low-pass filter (LPF) with ultracompact size and ultrawide stopband is proposed. The 3-D magnetic coupling is enhanced between microsize spiral inductors to increase the mutual inductance and improve the high-frequency performance. A coaxial TSV with enhanced capacitance in high resistivity silicon (HRS) is utilized both as capacitor and as a vertical interconnection without any overhead in area and routing. The 3-D nature of the proposed filter yields a miniaturized size of <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="12.962ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 5581 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-30"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-32" x="779" y="0"></use> <use xlink:href="#MJMATHI-74" x="1279" y="0"></use> <use xlink:href="#MJMATHI-69" x="1641" y="0"></use> <use xlink:href="#MJMATHI-6D" x="1986" y="0"></use> <use xlink:href="#MJMATHI-65" x="2865" y="0"></use> <use xlink:href="#MJMATHI-73" x="3331" y="0"></use><g transform="translate(3801,0)"> <use xlink:href="#MJMAIN-30"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-31" x="779" y="0"></use> <use xlink:href="#MJMAIN-30" x="1279" y="0"></use></g></g></svg></span> mm². The LPF is analyzed with equivalent circuit model and validated with the well-matched <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="1.499ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 645.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-53" x="0" y="0"></use></g></svg></span> -parameters obtained by finite element method simulation and measurement. 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engineering, electrical & electronic