Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace

W. Chang,M. Mohamed,B. Majlis,Kong Eng Ng,T. Y. Tiong,C. Dee
DOI: https://doi.org/10.1109/SMELEC.2018.8481292
2018-08-01
Abstract:In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.
Engineering,Materials Science
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